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Principles of plasma discharges and ...
~
Lichtenberg, Allan J.
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Principles of plasma discharges and materials processing /
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Principles of plasma discharges and materials processing // Michael A. Lieberman, Allan J. Lichtenberg.
Author:
Lieberman, M. A.
other author:
Lichtenberg, Allan J.
Published:
New York :John Wiley & Sons, : c1994.,
Description:
xxvi, 572 p. :ill. ;25 cm.
Notes:
"A Wiley-Interscience publication."
Subject:
Plasma chemistry. -
ISBN:
0471005770 :
Principles of plasma discharges and materials processing /
Lieberman, M. A.
Principles of plasma discharges and materials processing /
Michael A. Lieberman, Allan J. Lichtenberg. - New York :John Wiley & Sons,c1994. - xxvi, 572 p. :ill. ;25 cm.
"A Wiley-Interscience publication."
Includes bibliographical references (p. 559-564) and index.
ISBN: 0471005770 :US94.95
LCCN: 94028954Subjects--Topical Terms:
723721
Plasma chemistry.
LC Class. No.: QC718.5.D9 / L54 1994
Dewey Class. No.: 530.4/4
Principles of plasma discharges and materials processing /
LDR
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Principles of plasma discharges and materials processing /
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Michael A. Lieberman, Allan J. Lichtenberg.
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c1994.
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John Wiley & Sons,
300
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xxvi, 572 p. :
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ill. ;
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25 cm.
500
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"A Wiley-Interscience publication."
504
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Includes bibliographical references (p. 559-564) and index.
650
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Plasma chemistry.
$3
723721
650
$a
Plasma dynamics.
$3
723722
650
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Plasma etching.
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712111
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Thin films
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Surfaces.
$3
697334
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Lichtenberg, Allan J.
$3
714468
based on 0 review(s)
Location:
ALL
六樓西文書區HC-Z(6F Western Language Books)
Year:
Volume Number:
Items
1 records • Pages 1 •
1
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Attachments
W0045635
六樓西文書區HC-Z(6F Western Language Books)
01.外借(書)_YB
一般圖書
QC718.5.D9 L54 1994
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1 records • Pages 1 •
1
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