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VLSI metallization : = physics and t...

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Shenai, Krishna.

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VLSI metallization : = physics and technologies /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	VLSI metallization :/ Krishna Shenai, editor.
Reminder of title:	physics and technologies /
other author:	Shenai, Krishna.
Published:	Boston :Artech House, : c1991.,
Description:	x, 529 p. :ill. ;28 cm.
Series:	The Artech House materials science library
Subject:	Electric contacts. -
ISBN:	0890065012 (pbk.) :

VLSI metallization : = physics and technologies /
VLSI metallization :physics and technologies /Krishna Shenai, editor. - Boston :Artech House,c1991. - x, 529 p. :ill. ;28 cm. - The Artech House materials science library.

Includes bibliographical references and indexes.

ISBN: 0890065012 (pbk.) :US29.00

LCCN: 90049544Subjects--Topical Terms:

661282
Electric contacts.

LC Class. No.: TK7872.C68 / V58 1991

Dewey Class. No.: 621.381/52

VLSI metallization : = physics and technologies /
LDR:00598pam a2200181 a 45 001 671704
005 19990318155300.0
008 900918s1991 maua b 00100 eng
010 $a 90049544
020 $a 0890065012 (pbk.) : $c US29.00
035 $a ee 00880083
040 $a DLC $c DLC $d DLC
050 0 0 $a TK7872.C68 $b V58 1991
082 0 0 $a 621.381/52 $2 20
245 0 0 $a VLSI metallization : $b physics and technologies / $c Krishna Shenai, editor.
260 0 $a Boston : $c c1991. $b Artech House,
300 $a x, 529 p. : $b ill. ; $c 28 cm.
440 4 $a The Artech House materials science library
504 $a Includes bibliographical references and indexes.
650 $a Electric contacts. $3 661282
650 $a Semiconductor-metal boundaries. $3 661283
700 $a Shenai, Krishna. $3 653672

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罕用書庫221室(美崙校區,調書請點預約)(RU_221)

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TK7872.C68 V58 1991

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