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Plasma synthesis and etching of elec...

Abeles, B.

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Plasma synthesis and etching of electronic materials : = symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Plasma synthesis and etching of electronic materials :/ editors, R.P.H. Chang, B. Abeles.
其他題名:	symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. /
其他作者:	Abeles, B.
出版者:	Pittsburgh, Pa. :Materials Research Society, : c1985.,
面頁冊數:	xv, 522 p. :ill. ;24 cm.
附註:	Papers presented at the Symposium on Plasma Synthesis and Etching of Electronic Materials held in Boston, Mass. on Nov. 27-30, 1984.
叢書名:	Materials Research Society symposia proceedings ;
標題:	Electronics - Materials -
ISBN:	0931837030 :

Plasma synthesis and etching of electronic materials : = symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. /
Plasma synthesis and etching of electronic materials :symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. /editors, R.P.H. Chang, B. Abeles. - Pittsburgh, Pa. :Materials Research Society,c1985. - xv, 522 p. :ill. ;24 cm. - Materials Research Society symposia proceedings ;v. 38.

Papers presented at the Symposium on Plasma Synthesis and Etching of Electronic Materials held in Boston, Mass. on Nov. 27-30, 1984.

Includes bibliographies and indexes.

ISBN: 0931837030 :$43.00

LCCN: 85003085Subjects--Topical Terms:

658475
Electronics
--Materials

LC Class. No.: TA2005 / .P54 1985

Dewey Class. No.: 621.044

Plasma synthesis and etching of electronic materials : = symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. /
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