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Plasma synthesis and etching of elec...

Abeles, B.

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Plasma synthesis and etching of electronic materials : = symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Plasma synthesis and etching of electronic materials :/ editors, R.P.H. Chang, B. Abeles.
Reminder of title:	symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. /
other author:	Abeles, B.
Published:	Pittsburgh, Pa. :Materials Research Society, : c1985.,
Description:	xv, 522 p. :ill. ;24 cm.
Notes:	Papers presented at the Symposium on Plasma Synthesis and Etching of Electronic Materials held in Boston, Mass. on Nov. 27-30, 1984.
Series:	Materials Research Society symposia proceedings ;
Subject:	Electronics - Materials -
ISBN:	0931837030 :

Plasma synthesis and etching of electronic materials : = symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. /
Plasma synthesis and etching of electronic materials :symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. /editors, R.P.H. Chang, B. Abeles. - Pittsburgh, Pa. :Materials Research Society,c1985. - xv, 522 p. :ill. ;24 cm. - Materials Research Society symposia proceedings ;v. 38.

Papers presented at the Symposium on Plasma Synthesis and Etching of Electronic Materials held in Boston, Mass. on Nov. 27-30, 1984.

Includes bibliographies and indexes.

ISBN: 0931837030 :$43.00

LCCN: 85003085Subjects--Topical Terms:

658475
Electronics
--Materials

LC Class. No.: TA2005 / .P54 1985

Dewey Class. No.: 621.044

Plasma synthesis and etching of electronic materials : = symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. /
LDR:00834pam a2200193 a 45 001 670560
005 19980924112222.1
008 850211s1985 paua b 101 0 eng
010 $a 85003085
020 $a 0931837030 : $c $43.00
035 $a me 87000237
040 $a NDHU $c NDHU $d NDHU
050 0 $a TA2005 $b .P54 1985
082 0 $a 621.044 $2 19
245 0 0 $a Plasma synthesis and etching of electronic materials : $b symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / $c editors, R.P.H. Chang, B. Abeles.
260 0 $a Pittsburgh, Pa. : $c c1985. $b Materials Research Society,
300 $a xv, 522 p. : $b ill. ; $c 24 cm.
440 0 $a Materials Research Society symposia proceedings ; $v v. 38
500 $a Papers presented at the Symposium on Plasma Synthesis and Etching of Electronic Materials held in Boston, Mass. on Nov. 27-30, 1984.
504 $a Includes bibliographies and indexes.
650 $a Electronics $x Materials $x Congresses. $3 658475
650 $a Plasma engineering $x Congresses. $3 703246
650 $a Plasma etching $x Congresses. $3 703393
700 $a Abeles, B. $3 703391
700 $a Chang, R. P. H. $q (Robert Pang Heng), $d 1941- $3 703392
711 $a Symposium on Plasma Synthesis and Etching of Electronic Materials $d (1984 : $c Boston, Mass.) $3 703394