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Rapid thermal processing of electron...

Davies, D. Eirug.

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Rapid thermal processing of electronic materials : = symposium held April 21-23, 1987, Anaheim California, U.S.A. /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Rapid thermal processing of electronic materials :/ editors, Syd R. Wilson, Ronald Powell, D. Eirug Davies.
其他題名:	symposium held April 21-23, 1987, Anaheim California, U.S.A. /
其他作者:	Davies, D. Eirug.
出版者:	Pittsburgh, Pa. :Materials Research Society, : c1987.,
面頁冊數:	xvii, 485 p. :ill. ;24 cm.
叢書名:	Materials Research Society Symposia proceedings ;
標題:	Rapid thermal processing - Congresses. -
ISBN:	0931837596

Rapid thermal processing of electronic materials : = symposium held April 21-23, 1987, Anaheim California, U.S.A. /
Rapid thermal processing of electronic materials :symposium held April 21-23, 1987, Anaheim California, U.S.A. /editors, Syd R. Wilson, Ronald Powell, D. Eirug Davies. - Pittsburgh, Pa. :Materials Research Society,c1987. - xvii, 485 p. :ill. ;24 cm. - Materials Research Society Symposia proceedings ;v. 92.

Includes bibliographies and indexes.

ISBN: 0931837596

LCCN: 87022025 //r95Subjects--Topical Terms:

703389
Rapid thermal processing
--Congresses.

LC Class. No.: TK7871.85 / .R347 1987

Dewey Class. No.: 621.3815/2

Rapid thermal processing of electronic materials : = symposium held April 21-23, 1987, Anaheim California, U.S.A. /
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245 0 0 $a Rapid thermal processing of electronic materials : $b symposium held April 21-23, 1987, Anaheim California, U.S.A. / $c editors, Syd R. Wilson, Ronald Powell, D. Eirug Davies.
260 0 $a Pittsburgh, Pa. : $c c1987. $b Materials Research Society,
300 $a xvii, 485 p. : $b ill. ; $c 24 cm.
440 0 $a Materials Research Society Symposia proceedings ; $v v. 92
504 $a Includes bibliographies and indexes.
650 $a Rapid thermal processing $x Congresses. $3 703389
650 $a Semiconductor doping $x Congresses. $3 703306
650 $a Semiconductors $x Heat treatment $x Congresses. $3 703390
700 $a Davies, D. Eirug. $3 703386
700 $a Powell, Ronald A. $3 703387
700 $a Wilson, Syd R. $3 703388