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Nanolithography : = a borderland bet...

Gentili, M.

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Nanolithography : = a borderland between STM, EB, IB, and X-ray lithographies /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Nanolithography :/ edited by M. Gentili, C. Giovannella, and S. Selci.
Reminder of title:	a borderland between STM, EB, IB, and X-ray lithographies /
other author:	Gentili, M.
corporate name:	NATO Advanced Research Workshop on "Nanolithography: a Borderland Between STM, EB, IB, and X-Ray Lithographies"
Published:	Dordrecht ;Kluwer Academic Publishers, : 1994.,
Description:	xii, 212 p. :ill. ;25 cm.
Notes:	"Proceedings of the NATO Advanced Research Workshop on "Nanolithography: a Borderland Between STM, EB, IB, and X-Ray Lithographies", Frascati, Roma, Italy, April 6-8, 1993"--T.p. verso.
Series:	NATO ASI series.
Subject:	Integrated circuits - Design and construction -
ISBN:	0792327942 (acid-free paper)

Nanolithography : = a borderland between STM, EB, IB, and X-ray lithographies /
Nanolithography :a borderland between STM, EB, IB, and X-ray lithographies /edited by M. Gentili, C. Giovannella, and S. Selci. - Dordrecht ;Kluwer Academic Publishers,1994. - xii, 212 p. :ill. ;25 cm. - NATO ASI series.Series E,Applied sciences ;no. 264.

"Proceedings of the NATO Advanced Research Workshop on "Nanolithography: a Borderland Between STM, EB, IB, and X-Ray Lithographies", Frascati, Roma, Italy, April 6-8, 1993"--T.p. verso.

Includes bibliographical references and indexes.

ISBN: 0792327942 (acid-free paper)

LCCN: 94010205 //r94Subjects--Topical Terms:

660405
Integrated circuits
--Design and construction

LC Class. No.: TK7874.8 / .N37 1993

Dewey Class. No.: 621.3815/31

Nanolithography : = a borderland between STM, EB, IB, and X-ray lithographies /
LDR:00997nam a2200217 a 45 001 650188
003 DLC
005 19941212123014.5
008 940309s1994 ne a b 101 0 eng
010 $a 94010205 //r94
020 $a 0792327942 (acid-free paper)
035 $a dt 00009320 //r94
040 $a DLC $c DLC $d DLC
050 0 0 $a TK7874.8 $b .N37 1993
082 0 0 $a 621.3815/31 $2 20
111 $a NATO Advanced Research Workshop on "Nanolithography: a Borderland Between STM, EB, IB, and X-Ray Lithographies" $d (1993 : $c Frascati, Italy) $3 665024
245 1 0 $a Nanolithography : $b a borderland between STM, EB, IB, and X-ray lithographies / $c edited by M. Gentili, C. Giovannella, and S. Selci.
260 $a Dordrecht ; $a Boston : $c 1994. $b Kluwer Academic Publishers,
300 $a xii, 212 p. : $b ill. ; $c 25 cm.
440 0 $a NATO ASI series. $n Series E, $p Applied sciences ; $v no. 264
500 $a "Proceedings of the NATO Advanced Research Workshop on "Nanolithography: a Borderland Between STM, EB, IB, and X-Ray Lithographies", Frascati, Roma, Italy, April 6-8, 1993"--T.p. verso.
500 $a "Published in cooperation with NATO Scientific Affairs Division."
504 $a Includes bibliographical references and indexes.
650 $a Integrated circuits $x Design and construction $x Congresses. $3 660405
650 $a Microlithography $x Congresses. $3 665025
650 $a Molecular electronics $x Congresses. $3 665026
650 $a Nanotechnology $x Congresses. $3 536292
700 $a Gentili, M. $3 665021
700 $a Giovannella, Carlo. $3 665022
700 $a Selci, S. $3 665023