東華大學圖書館 |

Language: English

Help

回圖書館首頁

手機版館藏查詢

Back

Switch To: Labeled | MARC Mode | ISBD

Development of Low-Temperature Atomi...

Gregory, Dillon A.

Linked to FindBook

Google Book

Amazon

博客來

Development of Low-Temperature Atomic Layer Deposition of Ultra-Thin RuCo Direct Plate Liners for Flexible Electronics Applications.

Record Type:	Electronic resources : Monograph/item
Title/Author:	Development of Low-Temperature Atomic Layer Deposition of Ultra-Thin RuCo Direct Plate Liners for Flexible Electronics Applications./
Author:	Gregory, Dillon A.
Published:	Ann Arbor : ProQuest Dissertations & Theses, : 2016,
Description:	44 p.
Notes:	Source: Masters Abstracts International, Volume: 78-04.
Contained By:	Masters Abstracts International78-04.
Subject:	Nanoscience. -
Online resource:	https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=10144785
ISBN:	9781339999036

Development of Low-Temperature Atomic Layer Deposition of Ultra-Thin RuCo Direct Plate Liners for Flexible Electronics Applications.
Gregory, Dillon A.

Development of Low-Temperature Atomic Layer Deposition of Ultra-Thin RuCo Direct Plate Liners for Flexible Electronics Applications. - Ann Arbor : ProQuest Dissertations & Theses, 2016 - 44 p.

Source: Masters Abstracts International, Volume: 78-04.

Thesis (M.S.)--State University of New York at Albany, 2016.

This item must not be sold to any third party vendors.

Low temperature plasma-assisted atomic layer deposition-grown metal nanocomposite layers based on mixtures of ruthenium and cobalt have been investigated as potential copper adhesion/barrier layers in flexible electronics applications. The success of adapting this process to flexible electronics depends on the candidate barriers meeting several necessary properties including sufficient electrical conductivity, compatibility with Cu electroplating, and ability to prevent Cu diffusion into the substrate. Preliminary testing has shown that atomic layer deposition (ALD) can be used as a technique for depositing alloyed metallic barrier layers at the lower thermal constraints dictated by the use of polymer substrates and still produce continuous and electrically conductive metallic thin films. This has been achieved by lowering ALD processing temperatures to below the glass transition temperatures of polymeric substrate materials used in flexible electronics, including polyimide (PI), polyethylene terephthalate (PET), and polyethylene naphthalate (PEN) in order to maintain their structural integrity. These liner films, processed at temperatures as low as 100°C, are observed to support direct (i.e. seedless) electrochemical deposition of copper, though they failed to effectively act as barriers preventing copper diffusion into the dielectric substrate material. Possible reasons for this behavior and additional studies to address it are also discussed.

ISBN: 9781339999036Subjects--Topical Terms:

587832
Nanoscience.
Subjects--Index Terms:

Atomic layer deposition

Development of Low-Temperature Atomic Layer Deposition of Ultra-Thin RuCo Direct Plate Liners for Flexible Electronics Applications.
LDR:02741nmm a2200373 4500 001 2397308
005 20240624103640.5
006 m o d
007 cr#unu||||||||
008 251215s2016 ||||||||||||||||| ||eng d
020 $a 9781339999036
035 $a (MiAaPQ)AAI10144785
035 $a (MiAaPQ)sunyalb:11934
035 $a AAI10144785
040 $a MiAaPQ $c MiAaPQ
100 1 $a Gregory, Dillon A. $3 3767074
245 1 0 $a Development of Low-Temperature Atomic Layer Deposition of Ultra-Thin RuCo Direct Plate Liners for Flexible Electronics Applications.
260 1 $a Ann Arbor : $b ProQuest Dissertations & Theses, $c 2016
300 $a 44 p.
500 $a Source: Masters Abstracts International, Volume: 78-04.
500 $a Publisher info.: Dissertation/Thesis.
500 $a Advisor: Eisenbraun, Eric T.
502 $a Thesis (M.S.)--State University of New York at Albany, 2016.
506 $a This item must not be sold to any third party vendors.
520 $a Low temperature plasma-assisted atomic layer deposition-grown metal nanocomposite layers based on mixtures of ruthenium and cobalt have been investigated as potential copper adhesion/barrier layers in flexible electronics applications. The success of adapting this process to flexible electronics depends on the candidate barriers meeting several necessary properties including sufficient electrical conductivity, compatibility with Cu electroplating, and ability to prevent Cu diffusion into the substrate. Preliminary testing has shown that atomic layer deposition (ALD) can be used as a technique for depositing alloyed metallic barrier layers at the lower thermal constraints dictated by the use of polymer substrates and still produce continuous and electrically conductive metallic thin films. This has been achieved by lowering ALD processing temperatures to below the glass transition temperatures of polymeric substrate materials used in flexible electronics, including polyimide (PI), polyethylene terephthalate (PET), and polyethylene naphthalate (PEN) in order to maintain their structural integrity. These liner films, processed at temperatures as low as 100°C, are observed to support direct (i.e. seedless) electrochemical deposition of copper, though they failed to effectively act as barriers preventing copper diffusion into the dielectric substrate material. Possible reasons for this behavior and additional studies to address it are also discussed.
590 $a School code: 0668.
650 4 $a Nanoscience. $3 587832
653 $a Atomic layer deposition
653 $a Flexible electronics
653 $a Interconnect technology
690 $a 0565
710 2 $a State University of New York at Albany. $b Nanoscale Science and Engineering-Nanoscale Engineering. $3 1674751
773 0 $t Masters Abstracts International $g 78-04.
790 $a 0668
791 $a M.S.
792 $a 2016
793 $a English
856 4 0 $u https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=10144785