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High Fidelity Modeling Techniques for MEMS Resonators.

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	High Fidelity Modeling Techniques for MEMS Resonators./
作者:	Schein, Stephen.
面頁冊數:	1 online resource (166 pages)
附註:	Source: Dissertations Abstracts International, Volume: 84-09, Section: B.
Contained By:	Dissertations Abstracts International84-09B.
標題:	Mechanical engineering. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=30311859click for full text (PQDT)
ISBN:	9798377640912

High Fidelity Modeling Techniques for MEMS Resonators.
Schein, Stephen.

High Fidelity Modeling Techniques for MEMS Resonators. - 1 online resource (166 pages)

Source: Dissertations Abstracts International, Volume: 84-09, Section: B.

Thesis (Ph.D.)--University of California, Los Angeles, 2023.

Includes bibliographical references

Prior resonator research is first over-viewed. Galerkin analysis applied to a perturbed thin ring yields intuition and motivation for the primary contributions, described below.The first contribution is a fully fleshed novel method to derive the empirical frequency response by extracting a state space model from transient data through a Hankel matrix based approach. This method has the advantage of not containing feed-through parasitic capacitance present in frequency responses derived from conventional methods. Furthermore, a zoom method is described to reduce the computational cost associated with extracting the state space based model.The second contribution is the use of the aforementioned empirical state space model to fit a second order mechanistic model that accurately predicts changes in resonator dynamics after a mass and/or stiffness perturbation has been applied. This model is a better alternative to older predictive models because it includes a stiffness energy component. In addition, this new model gives the added tool of a predictive system frequency response, which conventional models do not have. In general it is found that, especially as the modes are close to degenerate, using lower sensitivity point masses in the outermost ring layers optimizes the predictive power of the new model. Furthermore, predicting for the effects of as few point masses as possible limits the model due to point mass variance and higher harmonic radial velocity components creating model prediction error.The third contribution is in the design, building, and testing of a stiff, piezoelectric six degree of freedom force/torque transducer to measure and inform modeling techniques for coupling between a resonator and its base affixed center stem. A simple lightweight steel tuning fork attached to this transducer confirms the latter's efficacy.

Electronic reproduction.
Ann Arbor, Mich. :
ProQuest,
2023

Mode of access: World Wide Web

ISBN: 9798377640912Subjects--Topical Terms:

649730
Mechanical engineering.
Subjects--Index Terms:

Force/torque transducerIndex Terms--Genre/Form:

542853
Electronic books.

High Fidelity Modeling Techniques for MEMS Resonators.
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