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Development of a Piezoelectric MEMS Pressure Sensor for Quench Detection in Cryogenic Superconductors.

Record Type:	Electronic resources : Monograph/item
Title/Author:	Development of a Piezoelectric MEMS Pressure Sensor for Quench Detection in Cryogenic Superconductors./
Author:	Anilus, Mischael.
Description:	1 online resource (103 pages)
Notes:	Source: Masters Abstracts International, Volume: 83-12.
Contained By:	Masters Abstracts International83-12.
Subject:	Mechanical engineering. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=29169419click for full text (PQDT)
ISBN:	9798438773245

Development of a Piezoelectric MEMS Pressure Sensor for Quench Detection in Cryogenic Superconductors.
Anilus, Mischael.

Development of a Piezoelectric MEMS Pressure Sensor for Quench Detection in Cryogenic Superconductors. - 1 online resource (103 pages)

Source: Masters Abstracts International, Volume: 83-12.

Thesis (M.S.)--Tufts University, 2022.

Includes bibliographical references

High temperature superconductors (HTS) allow for the transfer of high currents as well as the generation of strong magnetic fields. They are a fundamental tool used in high energy physics processes such as energy generation, transportation and storage. Generally a superconductor will have certain operation parameters, such as a critical temperature and critical current density. Operational parameters such as critical temperature are maintained by constant cooling through the means of a cryogenic medium or fluid. A quench is the natural effect of surpassing these parameters in which the material makes the switch from a superconducting state to a normal state. This rapid switch is unwanted and can be damaging to the overall system. Quench detection methods that work for typical superconductors are not as affective for high temperature superconductors.A team from Tufts University, MIT, and Tanner Research Inc. proposed using an array of MEMS microphones to detect quenches while immersed in cryogenic fluid. This thesis proposes the fabrication of a MEMS pressure sensor that can detect quench pressure pulses (0.1-1 MPa) in cryogenic (>20 K) temperatures. The pressure sensor is based on piezoelectric Aluminum Nitride. FEA analysis was conducted to guarantee strain survival as well as sensitivity in the expected pressure range. A fabrication process was developed starting with the design of necessary photolithography masks. From there thin film characterization has been started, and further means of testing and future work are discussed.

Electronic reproduction.
Ann Arbor, Mich. :
ProQuest,
2023

Mode of access: World Wide Web

ISBN: 9798438773245Subjects--Topical Terms:

649730
Mechanical engineering.
Subjects--Index Terms:

CryogenicIndex Terms--Genre/Form:

542853
Electronic books.

Development of a Piezoelectric MEMS Pressure Sensor for Quench Detection in Cryogenic Superconductors.
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504 $a Includes bibliographical references
520 $a High temperature superconductors (HTS) allow for the transfer of high currents as well as the generation of strong magnetic fields. They are a fundamental tool used in high energy physics processes such as energy generation, transportation and storage. Generally a superconductor will have certain operation parameters, such as a critical temperature and critical current density. Operational parameters such as critical temperature are maintained by constant cooling through the means of a cryogenic medium or fluid. A quench is the natural effect of surpassing these parameters in which the material makes the switch from a superconducting state to a normal state. This rapid switch is unwanted and can be damaging to the overall system. Quench detection methods that work for typical superconductors are not as affective for high temperature superconductors.A team from Tufts University, MIT, and Tanner Research Inc. proposed using an array of MEMS microphones to detect quenches while immersed in cryogenic fluid. This thesis proposes the fabrication of a MEMS pressure sensor that can detect quench pressure pulses (0.1-1 MPa) in cryogenic (>20 K) temperatures. The pressure sensor is based on piezoelectric Aluminum Nitride. FEA analysis was conducted to guarantee strain survival as well as sensitivity in the expected pressure range. A fabrication process was developed starting with the design of necessary photolithography masks. From there thin film characterization has been started, and further means of testing and future work are discussed.
533 $a Electronic reproduction. $b Ann Arbor, Mich. : $c ProQuest, $d 2023
538 $a Mode of access: World Wide Web
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653 $a Quench detection
653 $a Superconductor
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