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Jumping Silicon Microrobots with Ele...

Schindler, Craig.

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Jumping Silicon Microrobots with Electrostatic Inchworm Motors and Energy Storing Substrate Springs.

Record Type:	Electronic resources : Monograph/item
Title/Author:	Jumping Silicon Microrobots with Electrostatic Inchworm Motors and Energy Storing Substrate Springs./
Author:	Schindler, Craig.
Published:	Ann Arbor : ProQuest Dissertations & Theses, : 2020,
Description:	93 p.
Notes:	Source: Dissertations Abstracts International, Volume: 82-04, Section: B.
Contained By:	Dissertations Abstracts International82-04B.
Subject:	Robotics. -
Online resource:	https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=27997964
ISBN:	9798678171436

Jumping Silicon Microrobots with Electrostatic Inchworm Motors and Energy Storing Substrate Springs.
Schindler, Craig.

Jumping Silicon Microrobots with Electrostatic Inchworm Motors and Energy Storing Substrate Springs. - Ann Arbor : ProQuest Dissertations & Theses, 2020 - 93 p.

Source: Dissertations Abstracts International, Volume: 82-04, Section: B.

Thesis (Ph.D.Eng.)--University of California, Berkeley, 2020.

This item must not be sold to any third party vendors.

Jumping microrobots are a burgeoning area of autonomous microelectromechanical systems (MEMS). This dissertation presents background, theory, designs, and results of the first jumping microrobots fabricated in a silicon-on-insulator (SOI) process using electrostatic inchworm motors etched into the device layer silicon and energy storing springs etched into the silicon substrate.Substrate silicon is much thicker than device layer silicon, and can therefore store a lot more mechanical energy per unit area than can device layer silicon.New high force density electrostatic inchworm motors designed to stretch and store energy in substrate springs are presented.The first ever SOI robot to use electrostatic inchworm motors to store energy in a substrate spring is presented.While this robot was unable to use its electrostatic inchworm motors to store enough energy to jump, it was able to store enough energy to kick both a 0.6 milligram 0402 capacitor and a 2.5 gram mass (which weighed more than 25 times that of the robot). Additionally, the robot was able to vertically jump 4cm when its substrate spring was manually compressed with tweezers.A redesigned robot is then presented which used its on-board electrostatic inchworm motor to store energy in its substrate spring and vertically jump 3.6mm.To date, this is the highest jumping SOI based microrobot as well as the only one to store mechanical energy in substrate silicon.Finally, steps towards integration of the robot with a CMOS brain and high voltage solar cells for full autonomy is presented, along with design improvements needed to achieve a one meter high vertical jump.

ISBN: 9798678171436Subjects--Topical Terms:

519753
Robotics.
Subjects--Index Terms:

Jumping microrobots

Jumping Silicon Microrobots with Electrostatic Inchworm Motors and Energy Storing Substrate Springs.
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245 1 0 $a Jumping Silicon Microrobots with Electrostatic Inchworm Motors and Energy Storing Substrate Springs.
260 1 $a Ann Arbor : $b ProQuest Dissertations & Theses, $c 2020
300 $a 93 p.
500 $a Source: Dissertations Abstracts International, Volume: 82-04, Section: B.
500 $a Advisor: Pister, Kristofer S. J.
502 $a Thesis (Ph.D.Eng.)--University of California, Berkeley, 2020.
506 $a This item must not be sold to any third party vendors.
520 $a Jumping microrobots are a burgeoning area of autonomous microelectromechanical systems (MEMS). This dissertation presents background, theory, designs, and results of the first jumping microrobots fabricated in a silicon-on-insulator (SOI) process using electrostatic inchworm motors etched into the device layer silicon and energy storing springs etched into the silicon substrate.Substrate silicon is much thicker than device layer silicon, and can therefore store a lot more mechanical energy per unit area than can device layer silicon.New high force density electrostatic inchworm motors designed to stretch and store energy in substrate springs are presented.The first ever SOI robot to use electrostatic inchworm motors to store energy in a substrate spring is presented.While this robot was unable to use its electrostatic inchworm motors to store enough energy to jump, it was able to store enough energy to kick both a 0.6 milligram 0402 capacitor and a 2.5 gram mass (which weighed more than 25 times that of the robot). Additionally, the robot was able to vertically jump 4cm when its substrate spring was manually compressed with tweezers.A redesigned robot is then presented which used its on-board electrostatic inchworm motor to store energy in its substrate spring and vertically jump 3.6mm.To date, this is the highest jumping SOI based microrobot as well as the only one to store mechanical energy in substrate silicon.Finally, steps towards integration of the robot with a CMOS brain and high voltage solar cells for full autonomy is presented, along with design improvements needed to achieve a one meter high vertical jump.
590 $a School code: 0028.
650 4 $a Robotics. $3 519753
650 4 $a Electrical engineering. $3 649834
650 4 $a Mechanics. $3 525881
653 $a Jumping microrobots
653 $a Electrostatic inchworm motors
653 $a Energy storing springs
653 $a Silicon substrate
690 $a 0771
690 $a 0544
690 $a 0346
710 2 $a University of California, Berkeley. $b Electrical Engineering & Computer Sciences. $3 1671057
773 0 $t Dissertations Abstracts International $g 82-04B.
790 $a 0028
791 $a Ph.D.Eng.
792 $a 2020
793 $a English
856 4 0 $u https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=27997964