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Non-invasive Optical Diagnostics to ...

Ruiz Bello, Juan Carlos.

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Non-invasive Optical Diagnostics to Determine Non-Maxwellian Electron Energy Distributions in Plasma Discharges.

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Non-invasive Optical Diagnostics to Determine Non-Maxwellian Electron Energy Distributions in Plasma Discharges./
作者:	Ruiz Bello, Juan Carlos.
出版者:	Ann Arbor : ProQuest Dissertations & Theses, : 2021,
面頁冊數:	161 p.
附註:	Source: Dissertations Abstracts International, Volume: 82-08, Section: B.
Contained By:	Dissertations Abstracts International82-08B.
標題:	Plasma physics. -
電子資源:	https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=28315823
ISBN:	9798569963379

Non-invasive Optical Diagnostics to Determine Non-Maxwellian Electron Energy Distributions in Plasma Discharges.
Ruiz Bello, Juan Carlos.

Non-invasive Optical Diagnostics to Determine Non-Maxwellian Electron Energy Distributions in Plasma Discharges. - Ann Arbor : ProQuest Dissertations & Theses, 2021 - 161 p.

Source: Dissertations Abstracts International, Volume: 82-08, Section: B.

Thesis (Ph.D.)--The University of Wisconsin - Madison, 2021.

This item must not be sold to any third party vendors.

The development and evaluation of a non-invasive optical diagnostic that uses the spectrum of light emitted by the plasma to determine non-Maxwellian electron energy distribution functions (EEDF) in low pressure (<80 mTorr) plasmas is described herein. Inelastic collisions by energetic electrons drive excitation, ionization, and dissociation processes key to the technological applications these plasmas enable. The diagnostic targets EEDFs for plasmas with an overabundance of high-energy electrons, when compared to a Maxwell-Boltzmann distribution (electrons in thermal equilibrium), for characterization of plasma properties and validation of predictive plasma models.Recorded emission line intensities are compared to those computed in an emission model based on excitation cross sections and three mathematical representations of the EEDF (a Maxwellian, summed with either a Kappa, second Maxwellian at higher electron temperature or log-normal function) for optimization of EEDF free parameters to produce a best fit. A Maxwellian dominating low electron energies is fitted using argon neutral lines, and Ne, He and Ar+ lines are used to fit each of the other three functions, which dominate the EEDF at higher energies.The diagnostic was tested on an inductively coupled plasma, with auxiliary electron injection to systematically manipulate the EEDF. The diagnostic yields statistically meaningful EEDFs to ~50 eV, well beyond the range of electron energies previously observed with electric (Langmuir) probes (~20 eV). Additionally, the diagnostic discriminates temperatures as extreme as 2 eV and 22 eV between lower and higher electron energy ranges, respectively.For each plasma condition, EEDFs obtained separately with the three mathematical representations converged to a common solution, to the extent possible given the range of the respective functions. Fitting a total of nine emission wavelengths was found to be optimal for determining EEDFs, and additional line intensities were predicted using the resulting EEDFs, with exceptions in the case of helium.Key to energy resolution in the EEDF was using a set of lines with excitation thresholds spanning the electron energy range of interest, prompting the use of the three gases; however, inclusion of metastable (concentrations measured by absorption spectroscopy for helium and neon) contributions was also found to be necessary.

ISBN: 9798569963379Subjects--Topical Terms:

3175417
Plasma physics.
Subjects--Index Terms:

Diagnostics

Non-invasive Optical Diagnostics to Determine Non-Maxwellian Electron Energy Distributions in Plasma Discharges.
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520 $a The development and evaluation of a non-invasive optical diagnostic that uses the spectrum of light emitted by the plasma to determine non-Maxwellian electron energy distribution functions (EEDF) in low pressure (<80 mTorr) plasmas is described herein. Inelastic collisions by energetic electrons drive excitation, ionization, and dissociation processes key to the technological applications these plasmas enable. The diagnostic targets EEDFs for plasmas with an overabundance of high-energy electrons, when compared to a Maxwell-Boltzmann distribution (electrons in thermal equilibrium), for characterization of plasma properties and validation of predictive plasma models.Recorded emission line intensities are compared to those computed in an emission model based on excitation cross sections and three mathematical representations of the EEDF (a Maxwellian, summed with either a Kappa, second Maxwellian at higher electron temperature or log-normal function) for optimization of EEDF free parameters to produce a best fit. A Maxwellian dominating low electron energies is fitted using argon neutral lines, and Ne, He and Ar+ lines are used to fit each of the other three functions, which dominate the EEDF at higher energies.The diagnostic was tested on an inductively coupled plasma, with auxiliary electron injection to systematically manipulate the EEDF. The diagnostic yields statistically meaningful EEDFs to ~50 eV, well beyond the range of electron energies previously observed with electric (Langmuir) probes (~20 eV). Additionally, the diagnostic discriminates temperatures as extreme as 2 eV and 22 eV between lower and higher electron energy ranges, respectively.For each plasma condition, EEDFs obtained separately with the three mathematical representations converged to a common solution, to the extent possible given the range of the respective functions. Fitting a total of nine emission wavelengths was found to be optimal for determining EEDFs, and additional line intensities were predicted using the resulting EEDFs, with exceptions in the case of helium.Key to energy resolution in the EEDF was using a set of lines with excitation thresholds spanning the electron energy range of interest, prompting the use of the three gases; however, inclusion of metastable (concentrations measured by absorption spectroscopy for helium and neon) contributions was also found to be necessary.
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