語系:
繁體中文
English
說明(常見問題)
回圖書館首頁
手機版館藏查詢
登入
回首頁
切換:
標籤
|
MARC模式
|
ISBD
Real-Time Coherent X-Ray Studies of ...
~
Myint, Peco.
FindBook
Google Book
Amazon
博客來
Real-Time Coherent X-Ray Studies of Kinetics and Dynamics in Self-Organized Ion Beam Nanopatterning.
紀錄類型:
書目-電子資源 : Monograph/item
正題名/作者:
Real-Time Coherent X-Ray Studies of Kinetics and Dynamics in Self-Organized Ion Beam Nanopatterning./
作者:
Myint, Peco.
出版者:
Ann Arbor : ProQuest Dissertations & Theses, : 2021,
面頁冊數:
130 p.
附註:
Source: Dissertations Abstracts International, Volume: 82-08, Section: B.
Contained By:
Dissertations Abstracts International82-08B.
標題:
Condensed matter physics. -
電子資源:
https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=28258730
ISBN:
9798569910922
Real-Time Coherent X-Ray Studies of Kinetics and Dynamics in Self-Organized Ion Beam Nanopatterning.
Myint, Peco.
Real-Time Coherent X-Ray Studies of Kinetics and Dynamics in Self-Organized Ion Beam Nanopatterning.
- Ann Arbor : ProQuest Dissertations & Theses, 2021 - 130 p.
Source: Dissertations Abstracts International, Volume: 82-08, Section: B.
Thesis (Ph.D.)--Boston University, 2021.
This item must not be sold to any third party vendors.
Real-time coherent Grazing-Incidence Small-Angle X-ray Scattering was used to investigate the average kinetics and the fluctuation dynamics during self-organized ion beam nano-patterning of two semiconductor surfaces: silicon at room temperature and germanium heated above its recrystallation temperature.For silicon nano-patterning, initially flat samples at room temperature were bombarded by a broad collimated beam of 1keV Ar+ and Kr+ ions at 65° polar angle, leading to the amorphization of the ion-irradiated surfaces and the spontaneous formation of nanoscale ripples. The temporal evolution of the average X-ray scattering intensity shows the evolution of average kinetics, while the fluctuation dynamics can be investigated by correlation of X-ray speckles. The surface behavior at early times can be explained within a linear theory framework. The transition away from the linear theory behavior is observed in the dynamics since the intensity correlation function quickly evolves into a compressed exponential decay on length scales corresponding to the peak wavelength and a stretched exponential decay on shorter length scales.The correlation times for silicon nano-patterning are maximum at the ripple wavelengths while they are smaller at other wavelengths. This has notable similarities and differences with the phenomenon of de Gennes narrowing. Overall, this dynamics behavior is found to be consistent with the simulations of a nonlinear growth model by Harrison et al. Following the formation of self-organized nano-ripples, they move across the surface. Homodyne X-ray alone cannot detect the motion, but because of the gradient of ion flux across the sample, we were able to measure in-situ the corresponding ripple velocity gradient by cross-correlating speckles and tracking their movements.For germanium nano-patterning at an elevated temperature, flat germanium samples kept at 300°C were bombarded by 1keV Ar+ ions at normal incidence. Unlike the case when surfaces are amorphizated during room temperature bombardment, the crystalline nano-pattern formation occurs mainly due to a surface instability caused by the Ehrlich-Schwoebel barrier. By using a linear theory analysis on the X-ray scattering intensities in the early times, we measured the contribution of the Ehrlich-Schwoebel barrier to the crystalline nano-patterning kinetics.
ISBN: 9798569910922Subjects--Topical Terms:
3173567
Condensed matter physics.
Subjects--Index Terms:
Coherent X-ray scattering
Real-Time Coherent X-Ray Studies of Kinetics and Dynamics in Self-Organized Ion Beam Nanopatterning.
LDR
:03537nmm a2200361 4500
001
2281540
005
20210920103537.5
008
220723s2021 ||||||||||||||||| ||eng d
020
$a
9798569910922
035
$a
(MiAaPQ)AAI28258730
035
$a
AAI28258730
040
$a
MiAaPQ
$c
MiAaPQ
100
1
$a
Myint, Peco.
$0
(orcid)0000-0002-7807-7775
$3
3560204
245
1 0
$a
Real-Time Coherent X-Ray Studies of Kinetics and Dynamics in Self-Organized Ion Beam Nanopatterning.
260
1
$a
Ann Arbor :
$b
ProQuest Dissertations & Theses,
$c
2021
300
$a
130 p.
500
$a
Source: Dissertations Abstracts International, Volume: 82-08, Section: B.
500
$a
Advisor: Ludwig, Karl.
502
$a
Thesis (Ph.D.)--Boston University, 2021.
506
$a
This item must not be sold to any third party vendors.
520
$a
Real-time coherent Grazing-Incidence Small-Angle X-ray Scattering was used to investigate the average kinetics and the fluctuation dynamics during self-organized ion beam nano-patterning of two semiconductor surfaces: silicon at room temperature and germanium heated above its recrystallation temperature.For silicon nano-patterning, initially flat samples at room temperature were bombarded by a broad collimated beam of 1keV Ar+ and Kr+ ions at 65° polar angle, leading to the amorphization of the ion-irradiated surfaces and the spontaneous formation of nanoscale ripples. The temporal evolution of the average X-ray scattering intensity shows the evolution of average kinetics, while the fluctuation dynamics can be investigated by correlation of X-ray speckles. The surface behavior at early times can be explained within a linear theory framework. The transition away from the linear theory behavior is observed in the dynamics since the intensity correlation function quickly evolves into a compressed exponential decay on length scales corresponding to the peak wavelength and a stretched exponential decay on shorter length scales.The correlation times for silicon nano-patterning are maximum at the ripple wavelengths while they are smaller at other wavelengths. This has notable similarities and differences with the phenomenon of de Gennes narrowing. Overall, this dynamics behavior is found to be consistent with the simulations of a nonlinear growth model by Harrison et al. Following the formation of self-organized nano-ripples, they move across the surface. Homodyne X-ray alone cannot detect the motion, but because of the gradient of ion flux across the sample, we were able to measure in-situ the corresponding ripple velocity gradient by cross-correlating speckles and tracking their movements.For germanium nano-patterning at an elevated temperature, flat germanium samples kept at 300°C were bombarded by 1keV Ar+ ions at normal incidence. Unlike the case when surfaces are amorphizated during room temperature bombardment, the crystalline nano-pattern formation occurs mainly due to a surface instability caused by the Ehrlich-Schwoebel barrier. By using a linear theory analysis on the X-ray scattering intensities in the early times, we measured the contribution of the Ehrlich-Schwoebel barrier to the crystalline nano-patterning kinetics.
590
$a
School code: 0017.
650
4
$a
Condensed matter physics.
$3
3173567
650
4
$a
Materials science.
$3
543314
650
4
$a
Nanotechnology.
$3
526235
653
$a
Coherent X-ray scattering
653
$a
Ion implantation
653
$a
Self-organized nano-patterning
653
$a
Surface science
690
$a
0794
690
$a
0611
690
$a
0652
710
2
$a
Boston University.
$b
Materials Science & Engineering ENG.
$3
3195090
773
0
$t
Dissertations Abstracts International
$g
82-08B.
790
$a
0017
791
$a
Ph.D.
792
$a
2021
793
$a
English
856
4 0
$u
https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=28258730
筆 0 讀者評論
館藏地:
全部
電子資源
出版年:
卷號:
館藏
1 筆 • 頁數 1 •
1
條碼號
典藏地名稱
館藏流通類別
資料類型
索書號
使用類型
借閱狀態
預約狀態
備註欄
附件
W9433273
電子資源
11.線上閱覽_V
電子書
EB
一般使用(Normal)
在架
0
1 筆 • 頁數 1 •
1
多媒體
評論
新增評論
分享你的心得
Export
取書館
處理中
...
變更密碼
登入