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Design, modeling, and diagnostics of...

Miura, Naoto.

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Design, modeling, and diagnostics of microplasma generation at microwave frequency.

Record Type:	Electronic resources : Monograph/item
Title/Author:	Design, modeling, and diagnostics of microplasma generation at microwave frequency./
Author:	Miura, Naoto.
Published:	Ann Arbor : ProQuest Dissertations & Theses, : 2012,
Description:	239 p.
Notes:	Source: Dissertations Abstracts International, Volume: 74-01, Section: B.
Contained By:	Dissertations Abstracts International74-01B.
Subject:	Electrical engineering. -
Online resource:	https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3512417
ISBN:	9781267413895

Design, modeling, and diagnostics of microplasma generation at microwave frequency.
Miura, Naoto.

Design, modeling, and diagnostics of microplasma generation at microwave frequency. - Ann Arbor : ProQuest Dissertations & Theses, 2012 - 239 p.

Source: Dissertations Abstracts International, Volume: 74-01, Section: B.

Thesis (Ph.D.)--Tufts University, 2012.

Plasmas are partially ionized gases that find wide utility in the processing of materials, especially in integrated circuit fabrication. Most industrial applications of plasma occur in near-vacuum where the electrons are hot (>10,000 K) but the gas remains near room temperature. Typical atmospheric plasmas, such as arcs, are hot and destructive to sensitive materials. Recently the emerging field of microplasmas has demonstrated that atmospheric ionization of cold gases is possible if the plasma is microscopic. This dissertation investigates the fundamental physical properties of two classes of microplasma, both driven by microwave electric fields. The extension of point-source microplasmas into a line-shaped plasma is also described. The line-shape plasma is important for atmospheric processing of materials using roll-coating. Microplasma generators driven near 1 GHz were designed using microstrip transmission lines and characterized using argon near atmospheric pressure. The electrical characteristics of the microplasma including the discharge voltage, current and resistance were estimated by comparing the experimental power reflection coefficient to that of an electromagnetic simulation. The gas temperature, argon metastable density and electron density were obtained by optical absorption and emission spectroscopy. The microscopic internal plasma structure was probed using spatially-resolved diode laser absorption spectroscopy of excited argon states. The spatially resolved diagnostics revealed that argon metastable atoms were depleted within the 200μm core of the microplasma where the electron density was maximum. Two microplasma generators, the split-ring resonator (SRR) and the transmission line (T-line) generator, were compared. The SRR ran efficiently with a high impedance plasma (>1000 Ω) and was stabilized by the self-limiting of absorbed power (<1W) as a lower impedance plasma caused an impedance mismatch. Gas temperatures were <1000 K and electron densities were ~1020 m-3, conditions which are favorable for treatment of delicate materials. The T-line generator ran most efficiently with an intense, low impedance plasma that matched the impedance of the T-line (35 Ω). With the T-line generator, the absorbed power could exceed 20W, which created an electron density of 1021 m-3, but the gas temperature exceeded 2000 K. Finally, line-shaped microplasmas based on resonant and non-resonant configurations were developed, tested, and analyzed.

ISBN: 9781267413895Subjects--Topical Terms:

649834
Electrical engineering.
Subjects--Index Terms:

Argon

Design, modeling, and diagnostics of microplasma generation at microwave frequency.
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520 $a Plasmas are partially ionized gases that find wide utility in the processing of materials, especially in integrated circuit fabrication. Most industrial applications of plasma occur in near-vacuum where the electrons are hot (>10,000 K) but the gas remains near room temperature. Typical atmospheric plasmas, such as arcs, are hot and destructive to sensitive materials. Recently the emerging field of microplasmas has demonstrated that atmospheric ionization of cold gases is possible if the plasma is microscopic. This dissertation investigates the fundamental physical properties of two classes of microplasma, both driven by microwave electric fields. The extension of point-source microplasmas into a line-shaped plasma is also described. The line-shape plasma is important for atmospheric processing of materials using roll-coating. Microplasma generators driven near 1 GHz were designed using microstrip transmission lines and characterized using argon near atmospheric pressure. The electrical characteristics of the microplasma including the discharge voltage, current and resistance were estimated by comparing the experimental power reflection coefficient to that of an electromagnetic simulation. The gas temperature, argon metastable density and electron density were obtained by optical absorption and emission spectroscopy. The microscopic internal plasma structure was probed using spatially-resolved diode laser absorption spectroscopy of excited argon states. The spatially resolved diagnostics revealed that argon metastable atoms were depleted within the 200μm core of the microplasma where the electron density was maximum. Two microplasma generators, the split-ring resonator (SRR) and the transmission line (T-line) generator, were compared. The SRR ran efficiently with a high impedance plasma (>1000 Ω) and was stabilized by the self-limiting of absorbed power (<1W) as a lower impedance plasma caused an impedance mismatch. Gas temperatures were <1000 K and electron densities were ~1020 m-3, conditions which are favorable for treatment of delicate materials. The T-line generator ran most efficiently with an intense, low impedance plasma that matched the impedance of the T-line (35 Ω). With the T-line generator, the absorbed power could exceed 20W, which created an electron density of 1021 m-3, but the gas temperature exceeded 2000 K. Finally, line-shaped microplasmas based on resonant and non-resonant configurations were developed, tested, and analyzed.
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