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A spherical aberration corrector usi...

Chao, Liang-chiun.

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A spherical aberration corrector using space charge.

Record Type:	Electronic resources : Monograph/item
Title/Author:	A spherical aberration corrector using space charge./
Author:	Chao, Liang-chiun.
Published:	Ann Arbor : ProQuest Dissertations & Theses, : 1998,
Description:	146 p.
Notes:	Source: Dissertations Abstracts International, Volume: 60-03, Section: B.
Contained By:	Dissertations Abstracts International60-03B.
Subject:	Fluid dynamics. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=9836373
ISBN:	9780591899559

A spherical aberration corrector using space charge.
Chao, Liang-chiun.

A spherical aberration corrector using space charge. - Ann Arbor : ProQuest Dissertations & Theses, 1998 - 146 p.

Source: Dissertations Abstracts International, Volume: 60-03, Section: B.

Thesis (Ph.D.)--University of Maryland, College Park, 1998.

This item must not be sold to any third party vendors.

The use of space charge for the correction of spherical aberration in focused ion beam systems has been investigated. A negative space charge cloud can be formed to reduce the spherical aberration of a lens for ions or for electrons, depending on the details of the space charge distribution. Spherical aberration is important in focused ion beam applications where large aperture angles are needed to obtain high beam currents used for milling or deposition, because it results in large tails on the current density distribution. A space charge distribution (cloud) can be produced with a small electron gun inside an electrostatic lens that can reduce this problem.

ISBN: 9780591899559Subjects--Topical Terms:

545210
Fluid dynamics.

A spherical aberration corrector using space charge.
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020 $a 9780591899559
035 $a (MiAaPQ)AAI9836373
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100 1 $a Chao, Liang-chiun. $3 3433838
245 1 0 $a A spherical aberration corrector using space charge.
260 1 $a Ann Arbor : $b ProQuest Dissertations & Theses, $c 1998
300 $a 146 p.
500 $a Source: Dissertations Abstracts International, Volume: 60-03, Section: B.
500 $a Publisher info.: Dissertation/Thesis.
500 $a Orloff, Jon.
502 $a Thesis (Ph.D.)--University of Maryland, College Park, 1998.
506 $a This item must not be sold to any third party vendors.
506 $a This item must not be added to any third party search indexes.
520 $a The use of space charge for the correction of spherical aberration in focused ion beam systems has been investigated. A negative space charge cloud can be formed to reduce the spherical aberration of a lens for ions or for electrons, depending on the details of the space charge distribution. Spherical aberration is important in focused ion beam applications where large aperture angles are needed to obtain high beam currents used for milling or deposition, because it results in large tails on the current density distribution. A space charge distribution (cloud) can be produced with a small electron gun inside an electrostatic lens that can reduce this problem.
590 $a School code: 0117.
650 4 $a Fluid dynamics. $3 545210
650 4 $a Gases. $3 559387
650 4 $a Optics. $3 517925
650 4 $a Electromagnetism. $3 522050
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710 2 $a University of Maryland, College Park. $3 657686
773 0 $t Dissertations Abstracts International $g 60-03B.
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791 $a Ph.D.
792 $a 1998
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856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=9836373