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A spherical aberration corrector usi...
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Chao, Liang-chiun.
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A spherical aberration corrector using space charge.
紀錄類型:
書目-電子資源 : Monograph/item
正題名/作者:
A spherical aberration corrector using space charge./
作者:
Chao, Liang-chiun.
出版者:
Ann Arbor : ProQuest Dissertations & Theses, : 1998,
面頁冊數:
146 p.
附註:
Source: Dissertations Abstracts International, Volume: 60-03, Section: B.
Contained By:
Dissertations Abstracts International60-03B.
標題:
Fluid dynamics. -
電子資源:
http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=9836373
ISBN:
9780591899559
A spherical aberration corrector using space charge.
Chao, Liang-chiun.
A spherical aberration corrector using space charge.
- Ann Arbor : ProQuest Dissertations & Theses, 1998 - 146 p.
Source: Dissertations Abstracts International, Volume: 60-03, Section: B.
Thesis (Ph.D.)--University of Maryland, College Park, 1998.
This item must not be sold to any third party vendors.
The use of space charge for the correction of spherical aberration in focused ion beam systems has been investigated. A negative space charge cloud can be formed to reduce the spherical aberration of a lens for ions or for electrons, depending on the details of the space charge distribution. Spherical aberration is important in focused ion beam applications where large aperture angles are needed to obtain high beam currents used for milling or deposition, because it results in large tails on the current density distribution. A space charge distribution (cloud) can be produced with a small electron gun inside an electrostatic lens that can reduce this problem.
ISBN: 9780591899559Subjects--Topical Terms:
545210
Fluid dynamics.
A spherical aberration corrector using space charge.
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The use of space charge for the correction of spherical aberration in focused ion beam systems has been investigated. A negative space charge cloud can be formed to reduce the spherical aberration of a lens for ions or for electrons, depending on the details of the space charge distribution. Spherical aberration is important in focused ion beam applications where large aperture angles are needed to obtain high beam currents used for milling or deposition, because it results in large tails on the current density distribution. A space charge distribution (cloud) can be produced with a small electron gun inside an electrostatic lens that can reduce this problem.
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