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Plasma etching processes for CMOS de...

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Posseme, Nicolas,

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Plasma etching processes for CMOS device realization /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Plasma etching processes for CMOS device realization // edited by Nicolas Posseme.
other author:	Posseme, Nicolas,
Description:	1 online resource (x, 121 pages) :illustrations
Subject:	Metal oxide semiconductors, Complementary. -
Online resource:	https://www.sciencedirect.com/science/book/9781785480966
ISBN:	9780081011966

Plasma etching processes for CMOS device realization /
Plasma etching processes for CMOS device realization /edited by Nicolas Posseme. - 1 online resource (x, 121 pages) :illustrations

Includes bibliographical references and index.

ISBN: 9780081011966Subjects--Topical Terms:

649504
Metal oxide semiconductors, Complementary.
Index Terms--Genre/Form:

542853
Electronic books.

LC Class. No.: TK7871.99.M44 / P63 2017

Dewey Class. No.: 621.39/732

Plasma etching processes for CMOS device realization /
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020 $a 9780081011966 $q (electronic bk.)
020 $a 0081011962 $q (electronic bk.)
020 $a 9781785480966 $q (print)
020 $a 1785480960 $q (print)
035 $a (OCoLC)970659018
035 $a els108120287
040 $a N$T $b eng $e rda $e pn $c N$T $d EBLCP $d OPELS $d IDEBK $d N$T $d UAB $d UIU $d OCLCF $d YDX $d WAU $d OTZ $d OCLCQ $d UPM $d MERUC $d U3W $d OCLCQ $d CNCGM $d LQU
041 0 $a eng
050 0 0 $a TK7871.99.M44 $b P63 2017
082 0 4 $a 621.39/732 $2 23
245 0 0 $a Plasma etching processes for CMOS device realization / $c edited by Nicolas Posseme.
264 1 $a London, UK : $b ISTE Press ; $a Kidlington, Oxford, UK : $b Elsevier, $c 2017.
300 $a 1 online resource (x, 121 pages) : $b illustrations
336 $a text $b txt $2 rdacontent
337 $a computer $b c $2 rdamedia
338 $a online resource $b cr $2 rdacarrier
504 $a Includes bibliographical references and index.
650 0 $a Metal oxide semiconductors, Complementary. $3 649504
650 0 $a Plasma etching. $3 712111
655 4 $a Electronic books. $2 lcsh $3 542853
700 1 $a Posseme, Nicolas, $e editor. $3 3398484
856 4 0 $u https://www.sciencedirect.com/science/book/9781785480966

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EB TK7871.99.M44 P63 2017

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