Physical design and mask synthesis f...
Shim, Seongbo.

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  • Physical design and mask synthesis for directed self-assembly lithography
  • 紀錄類型: 書目-電子資源 : Monograph/item
    正題名/作者: Physical design and mask synthesis for directed self-assembly lithography/ by Seongbo Shim, Youngsoo Shin.
    作者: Shim, Seongbo.
    其他作者: Shin, Youngsoo.
    出版者: Cham :Springer International Publishing : : 2018.,
    面頁冊數: xiv, 138 p. :ill. (some col.), digital ;24 cm.
    內容註: Introduction -- DSAL Manufacturability -- Placement Optimization for DSAL -- Placement Optimization for MP-DSAL Compliant Layout -- Redundant Via Insertion for DSAL.
    Contained By: Springer eBooks
    標題: Integrated circuits - Design and construction. -
    電子資源: http://dx.doi.org/10.1007/978-3-319-76294-4
    ISBN: 9783319762944
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W9343207 電子資源 11.線上閱覽_V 電子書 EB TK7874 .S556 2018 一般使用(Normal) 在架 0
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