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Nanofabrication = principles, capabi...

Cui, Zheng.

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Nanofabrication = principles, capabilities and limits /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Nanofabrication/ by Zheng Cui.
其他題名:	principles, capabilities and limits /
作者:	Cui, Zheng.
出版者:	Cham :Springer International Publishing : : 2017.,
面頁冊數:	xvii, 432 p. :ill., digital ;24 cm.
內容註:	1. Introduction -- 2. Nanofabrication by Photons -- 3. Nanofabrication by Electron Beam -- 4. Nanofabrication by Ion Beam -- 5. Nanofabrication by Scanning Probes -- 6. Nanofabrication by Replication -- 7. Nanoscale Pattern Transfer by Etching -- 8. Nanoscale Pattern Transfer by Deposition -- 9. Indirect Nanofabrication -- 10. Nanofabrication by Self-Assembly -- 11. Applications of Nanofabrication Technologies.
Contained By:	Springer eBooks
標題:	Nanotechnology. -
電子資源:	http://dx.doi.org/10.1007/978-3-319-39361-2
ISBN:	9783319393612

Nanofabrication = principles, capabilities and limits /
Cui, Zheng.

Nanofabricationprinciples, capabilities and limits /[electronic resource] :by Zheng Cui. - 2nd ed. - Cham :Springer International Publishing :2017. - xvii, 432 p. :ill., digital ;24 cm.

1. Introduction -- 2. Nanofabrication by Photons -- 3. Nanofabrication by Electron Beam -- 4. Nanofabrication by Ion Beam -- 5. Nanofabrication by Scanning Probes -- 6. Nanofabrication by Replication -- 7. Nanoscale Pattern Transfer by Etching -- 8. Nanoscale Pattern Transfer by Deposition -- 9. Indirect Nanofabrication -- 10. Nanofabrication by Self-Assembly -- 11. Applications of Nanofabrication Technologies.

This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.

ISBN: 9783319393612

Standard No.: 10.1007/978-3-319-39361-2doiSubjects--Topical Terms:

526235
Nanotechnology.

LC Class. No.: T174.7

Dewey Class. No.: 620.5

Nanofabrication = principles, capabilities and limits /
LDR:02010nmm a2200325 a 4500 001 2087597
003 DE-He213
005 20160810174457.0
006 m d
007 cr nn 008maaau
008 171013s2017 gw s 0 eng d
020 $a 9783319393612 $q (electronic bk.)
020 $a 9783319393599 $q (paper)
024 7 $a 10.1007/978-3-319-39361-2 $2 doi
035 $a 978-3-319-39361-2
040 $a GP $c GP
041 0 $a eng
050 4 $a T174.7
072 7 $a TDPB $2 bicssc
072 7 $a TEC027000 $2 bisacsh
082 0 4 $a 620.5 $2 23
090 $a T174.7 $b .C966 2017
100 1 $a Cui, Zheng. $3 3216604
245 1 0 $a Nanofabrication $h [electronic resource] : $b principles, capabilities and limits / $c by Zheng Cui.
250 $a 2nd ed.
260 $a Cham : $b Springer International Publishing : $b Imprint: Springer, $c 2017.
300 $a xvii, 432 p. : $b ill., digital ; $c 24 cm.
505 0 $a 1. Introduction -- 2. Nanofabrication by Photons -- 3. Nanofabrication by Electron Beam -- 4. Nanofabrication by Ion Beam -- 5. Nanofabrication by Scanning Probes -- 6. Nanofabrication by Replication -- 7. Nanoscale Pattern Transfer by Etching -- 8. Nanoscale Pattern Transfer by Deposition -- 9. Indirect Nanofabrication -- 10. Nanofabrication by Self-Assembly -- 11. Applications of Nanofabrication Technologies.
520 $a This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.
650 0 $a Nanotechnology. $3 526235
650 0 $a Nanomanufacturing. $3 2050039
650 1 4 $a Engineering. $3 586835
650 2 4 $a Nanotechnology and Microengineering. $3 1005737
650 2 4 $a Continuum Mechanics and Mechanics of Materials. $3 890989
650 2 4 $a Circuits and Systems. $3 896527
650 2 4 $a Optics and Electrodynamics. $3 1066865
710 2 $a SpringerLink (Online service) $3 836513
773 0 $t Springer eBooks
856 4 0 $u http://dx.doi.org/10.1007/978-3-319-39361-2
950 $a Engineering (Springer-11647)