東華大學圖書館 |

語系: 繁體中文

說明(常見問題)

回圖書館首頁

手機版館藏查詢

登入

回首頁

切換: 標籤 | MARC模式 | ISBD

Design, Fabrication, and Packaging o...

Novak, Joseph.

FindBook

Google Book

Amazon

博客來

Design, Fabrication, and Packaging of Mach-Zehnder Interferometers for Biological Sensing Applications.

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Design, Fabrication, and Packaging of Mach-Zehnder Interferometers for Biological Sensing Applications./
作者:	Novak, Joseph.
面頁冊數:	164 p.
附註:	Source: Dissertation Abstracts International, Volume: 76-10(E), Section: B.
Contained By:	Dissertation Abstracts International76-10B(E).
標題:	Nanotechnology. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3705627
ISBN:	9781321788846

Design, Fabrication, and Packaging of Mach-Zehnder Interferometers for Biological Sensing Applications.
Novak, Joseph.

Design, Fabrication, and Packaging of Mach-Zehnder Interferometers for Biological Sensing Applications. - 164 p.

Source: Dissertation Abstracts International, Volume: 76-10(E), Section: B.

Thesis (Ph.D.)--Rensselaer Polytechnic Institute, 2015.

This item must not be sold to any third party vendors.

Optical biological sensors are widely used in the fields of medical testing, water treatment and safety, gene identification, and many others due to advances in nanofabrication technology. This work focuses on the design of fiber-coupled Mach-Zehnder Interferometer (MZI) based biosensors fabricated on silicon-on-insulator (SOI) wafer. Silicon waveguide sensors are designed with multimode and single-mode dimensions. Input coupling efficiency is investigated by design of various taper structures. Integration processing and packaging is performed for fiber attachment and enhancement of input coupling efficiency.

ISBN: 9781321788846Subjects--Topical Terms:

526235
Nanotechnology.

Design, Fabrication, and Packaging of Mach-Zehnder Interferometers for Biological Sensing Applications.
LDR:03102nmm a2200325 4500 001 2062503
005 20151027073331.5
008 170521s2015 ||||||||||||||||| ||eng d
020 $a 9781321788846
035 $a (MiAaPQ)AAI3705627
035 $a AAI3705627
040 $a MiAaPQ $c MiAaPQ
100 1 $a Novak, Joseph. $3 2209908
245 1 0 $a Design, Fabrication, and Packaging of Mach-Zehnder Interferometers for Biological Sensing Applications.
300 $a 164 p.
500 $a Source: Dissertation Abstracts International, Volume: 76-10(E), Section: B.
500 $a Adviser: Zhaoran R. Huang.
502 $a Thesis (Ph.D.)--Rensselaer Polytechnic Institute, 2015.
506 $a This item must not be sold to any third party vendors.
520 $a Optical biological sensors are widely used in the fields of medical testing, water treatment and safety, gene identification, and many others due to advances in nanofabrication technology. This work focuses on the design of fiber-coupled Mach-Zehnder Interferometer (MZI) based biosensors fabricated on silicon-on-insulator (SOI) wafer. Silicon waveguide sensors are designed with multimode and single-mode dimensions. Input coupling efficiency is investigated by design of various taper structures. Integration processing and packaging is performed for fiber attachment and enhancement of input coupling efficiency.
520 $a Optical guided-wave sensors rely on single-mode operation to extract an induced phase-shift from the output signal. A silicon waveguide MZI sensor designed and fabricated for both multimode and single-mode dimensions. Sensitivity of the sensors is analyzed for waveguide dimensions and materials. An s-bend structure is designed for the multimode waveguide to eliminate higher-order mode power as an alternative to single-mode confinement. Single-mode confinement is experimentally demonstrated through near field imaging of waveguide output. Y-junctions are designed for 3dB power splitting to the MZI arms and for power recombination after sensing to utilize the interferometric function of the MZI. Ultra-short 10microm taper structures with curved geometries are designed to improve insertion loss from fiber-to-chip without significantly increasing device area and show potential for applications requiring misalignment tolerance.
520 $a An novel v-groove process is developed for self-aligned integration of fiber grooves for attachment to sensor chips. Thermal oxidation at temperatures from 1050-1150°C during groove processing creates an SiO2 layer on the waveguide end facet to protect the waveguide facet during integration etch processing without additional e-beam lithography processing. Experimental results show improvement of insertion loss compared to dicing preparation and Focused Ion Beam methods using the thermal oxidation process.
590 $a School code: 0185.
650 4 $a Nanotechnology. $3 526235
650 4 $a Optics. $3 517925
650 4 $a Electrical engineering. $3 649834
690 $a 0652
690 $a 0752
690 $a 0544
710 2 $a Rensselaer Polytechnic Institute. $b Electrical Engineering. $3 2098709
773 0 $t Dissertation Abstracts International $g 76-10B(E).
790 $a 0185
791 $a Ph.D.
792 $a 2015
793 $a English
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3705627