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Contact and Tribology of Surfaces wi...

Yu, Chengjiao.

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Contact and Tribology of Surfaces with Engineered Topography and Multilayer Coatings.

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Contact and Tribology of Surfaces with Engineered Topography and Multilayer Coatings./
作者:	Yu, Chengjiao.
面頁冊數:	214 p.
附註:	Source: Dissertation Abstracts International, Volume: 75-07(E), Section: B.
Contained By:	Dissertation Abstracts International75-07B(E).
標題:	Mechanical engineering. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3615545
ISBN:	9781303815652

Contact and Tribology of Surfaces with Engineered Topography and Multilayer Coatings.
Yu, Chengjiao.

Contact and Tribology of Surfaces with Engineered Topography and Multilayer Coatings. - 214 p.

Source: Dissertation Abstracts International, Volume: 75-07(E), Section: B.

Thesis (Ph.D.)--Northwestern University, 2014.

This item is not available from ProQuest Dissertations & Theses.

Surfaces involve complicated geometric and material issues. Engineered topography and coatings have been introduced to improve contact and tribological performances. It is a challenging task to predict the real contact area, pressure, deformation, and subsurface stress or strain for such a surface. The orientation of the surface topography affects the contact and friction of the interfaces formed with these surfaces. Designs of coating material and structure lead to significant modifications of the deformation and stress fields in the material system. The existence of surface roughness and multilayer coatings in the polishing pads for a chemical mechanical planarization (CMP) system is beneficial to the efficiency and quality of the polishing.

ISBN: 9781303815652Subjects--Topical Terms:

649730
Mechanical engineering.

Contact and Tribology of Surfaces with Engineered Topography and Multilayer Coatings.
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245 1 0 $a Contact and Tribology of Surfaces with Engineered Topography and Multilayer Coatings.
300 $a 214 p.
500 $a Source: Dissertation Abstracts International, Volume: 75-07(E), Section: B.
500 $a Adviser: Q. Jane Wang.
502 $a Thesis (Ph.D.)--Northwestern University, 2014.
506 $a This item is not available from ProQuest Dissertations & Theses.
506 $a This item must not be sold to any third party vendors.
520 $a Surfaces involve complicated geometric and material issues. Engineered topography and coatings have been introduced to improve contact and tribological performances. It is a challenging task to predict the real contact area, pressure, deformation, and subsurface stress or strain for such a surface. The orientation of the surface topography affects the contact and friction of the interfaces formed with these surfaces. Designs of coating material and structure lead to significant modifications of the deformation and stress fields in the material system. The existence of surface roughness and multilayer coatings in the polishing pads for a chemical mechanical planarization (CMP) system is beneficial to the efficiency and quality of the polishing.
520 $a This thesis aims at exploring the friction anisotropy phenomena with respect to surface topographic orientation and unveiling the origins of such phenomena by combining experimental exploration with mechanism analyses. It is also focused on the derivation of the analytical frequency response functions for analyzing the contact of multilayered materials and the development of a multi-physics three-dimensional numerical modeling tool for the contact of multilayered materials with non-smooth geometries; such model find its application in the CMP system for deterministic pad-wafer contact investigation and material removal rate prediction of the whole system.
520 $a The main contributions made by this thesis include: 1) a systematic comparison of the friction anisotropy phenomena with respect to surface topographic characteristics and understanding of the roles of pattern size, applied load, and materials on such anisotropic frictions; 2) novel analytic solutions of the frequency response functions (FRFs) for multilayered materials under normal and shear tractions, which serve as the analytical cores for solving the contact of such materials; 3) new contact models for solving the point contact and flat-flat contact of multilayered materials; 4) an improved multi-level wear model to predict the material removal rate of a CMP system. The models and formulas reported in this thesis will be useful tools for the tribological designs of multilayered materials and CMP systems.
590 $a School code: 0163.
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