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Fatigue and fracture of nickel MEMS ...

Yang, Yong.

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Fatigue and fracture of nickel MEMS thin films.

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Fatigue and fracture of nickel MEMS thin films./
作者:	Yang, Yong.
面頁冊數:	152 p.
附註:	Source: Dissertation Abstracts International, Volume: 68-09, Section: B, page: 6266.
Contained By:	Dissertation Abstracts International68-09B.
標題:	Engineering, Mechanical. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3281324
ISBN:	9780549230069

Fatigue and fracture of nickel MEMS thin films.
Yang, Yong.

Fatigue and fracture of nickel MEMS thin films. - 152 p.

Source: Dissertation Abstracts International, Volume: 68-09, Section: B, page: 6266.

Thesis (Ph.D.)--Princeton University, 2007.

This dissertation presents an experimental study on the fatigue and fracture of LIGA (the German acronym for lithography, electroplating and molding) Ni MEMS thin films with columnar microstructures.

ISBN: 9780549230069Subjects--Topical Terms:

783786
Engineering, Mechanical.

Fatigue and fracture of nickel MEMS thin films.
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245 1 0 $a Fatigue and fracture of nickel MEMS thin films.
300 $a 152 p.
500 $a Source: Dissertation Abstracts International, Volume: 68-09, Section: B, page: 6266.
502 $a Thesis (Ph.D.)--Princeton University, 2007.
520 $a This dissertation presents an experimental study on the fatigue and fracture of LIGA (the German acronym for lithography, electroplating and molding) Ni MEMS thin films with columnar microstructures.
520 $a Yield strength, ductility, ultimate tensile strength and fatigue endurance limits of LIGA Ni MEMS thin films were first obtained from micro-tensile and micro-fatigue experiments on dog-bone samples at 70 and 270 mum thicknesses. The results showed strong thickness effects and were compared to those of nanostructural LIGA Ni thin films. For both microstructural and nanostructural LIGA Ni thin films, different fatigue crack nucleation and growth mechanisms were explored.
520 $a In-situ micro-fracture experiments were then conducted on fatigue pre-cracked LIGA Ni compact tension (CT) specimens. The crack-tip strain fields were characterized using a SEM displacement mapping technique and were found to be consistent with the classic Hutchinson-Rice-Rosengren (HRR) field. The crack-tip blunting mechanism was observed and the JR crack growth resistance curve was obtained.
520 $a Long and short fatigue crack growth in Ni MEMS thin films were studied using the CT and dog-bone specimens, respectively. For long fatigue cracks at the micro-scale, the growth mechanism in the Paris regime was shown to be due to grain recrystallization, micro-void formation and coalescence. However, for short fatigue cracks at the submicron-scale, which were produced on micro-beams that were fabricated using the focused ion beam (FIB) technique in Ni MEMS dog-bone specimens, the nano-scale fatigue crack growth occurred in the crack-tip plasticity zone via an unzipping mechanism. Short fatigue crack growth anormalies were also observed and they were due to the interaction of the fatigue crack/dislocation slip band structures at the submicron-scale. Finally, a dislocation fracture mechanics model was developed and it provided a coherent analytic framework to rationalize the thickness-dependent fatigue stress-life behavior, long and short fatigue crack growth for LIGA Ni MEMS thin films.
590 $a School code: 0181.
650 4 $a Engineering, Mechanical. $3 783786
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710 2 $a Princeton University. $3 645579
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791 $a Ph.D.
792 $a 2007
793 $a English
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