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Materials and failures in MEMS and NEMS

Tiwari, Atul.

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Materials and failures in MEMS and NEMS

Record Type:	Electronic resources : Monograph/item
Title/Author:	Materials and failures in MEMS and NEMS/ edited by Atul Tiwari and Baldev Raj.
other author:	Tiwari, Atul.
Published:	Hoboken, NJ :John Wiley & Sons ; : c2015.,
Description:	1 online resource (xiv, 406 p.)
Subject:	Microelectromechanical systems - Design and construction. -
Online resource:	http://onlinelibrary.wiley.com/book/10.1002/9781119083887
ISBN:	9781119083887 (electronic bk.)

Materials and failures in MEMS and NEMS
Materials and failures in MEMS and NEMS[electronic resource] /edited by Atul Tiwari and Baldev Raj. - 1st ed. - Hoboken, NJ :John Wiley & Sons ;c2015. - 1 online resource (xiv, 406 p.) - Materials degradation and failures series. - Materials degradation and failure series..

Includes bibliographical references and index.

ISBN: 9781119083887 (electronic bk.)

LCCN: 2015027730Subjects--Topical Terms:

753820
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK7875 / .M3745 2015

Dewey Class. No.: 621.381

Materials and failures in MEMS and NEMS
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245 0 0 $a Materials and failures in MEMS and NEMS $h [electronic resource] / $c edited by Atul Tiwari and Baldev Raj.
250 $a 1st ed.
260 $a Hoboken, NJ : $b John Wiley & Sons ; $a Salem, Ma. : $b Scrivener Publishing, $c c2015.
300 $a 1 online resource (xiv, 406 p.)
490 1 $a Materials degradation and failures series
504 $a Includes bibliographical references and index.
588 $a Description based on online resource; title from digital title page (viewed on September 24, 2015).
588 $a Description based on print version record.
650 0 $a Microelectromechanical systems $x Design and construction. $3 753820
650 0 $a Nanoelectromechanical systems $x Design and construction. $3 2148607
700 1 $a Tiwari, Atul. $3 2054744
700 1 $a Raj, Baldev, $d 1947- $3 2205406
830 0 $a Materials degradation and failure series. $3 2205407
856 4 0 $u http://onlinelibrary.wiley.com/book/10.1002/9781119083887