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Micro/nano integrated fabrication te...

Zhang, Xiao-Sheng.

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Micro/nano integrated fabrication technology and its applications in microenergy harvesting

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Micro/nano integrated fabrication technology and its applications in microenergy harvesting/ by Xiao-Sheng Zhang.
作者:	Zhang, Xiao-Sheng.
出版者:	Berlin, Heidelberg :Springer Berlin Heidelberg : : 2016.,
面頁冊數:	xx, 122 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
標題:	Nanotechnology. -
電子資源:	http://dx.doi.org/10.1007/978-3-662-48816-4
ISBN:	9783662488164$q(electronic bk.)

Micro/nano integrated fabrication technology and its applications in microenergy harvesting
Zhang, Xiao-Sheng.

Micro/nano integrated fabrication technology and its applications in microenergy harvesting[electronic resource] /by Xiao-Sheng Zhang. - Berlin, Heidelberg :Springer Berlin Heidelberg :2016. - xx, 122 p. :ill., digital ;24 cm. - Springer theses,2190-5053. - Springer theses..

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.

ISBN: 9783662488164$q(electronic bk.)

Standard No.: 10.1007/978-3-662-48816-4doiSubjects--Topical Terms:

526235
Nanotechnology.

LC Class. No.: T174.7

Dewey Class. No.: 620.5

Micro/nano integrated fabrication technology and its applications in microenergy harvesting
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