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Handbook of thin film technology

Frey, Hartmut.

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Handbook of thin film technology

Record Type:	Electronic resources : Monograph/item
Title/Author:	Handbook of thin film technology/ edited by Hartmut Frey, Hamid R. Khan.
other author:	Frey, Hartmut.
Published:	Berlin, Heidelberg :Springer Berlin Heidelberg : : 2015.,
Description:	xiii, 379 p. :ill., digital ;24 cm.
[NT 15003449]:	Applications and developments of thin film technology -- Importance of the vacuum technology for thin film coatings -- Evaporation in the vacuum -- Basic principle of plasma physics -- Gaseous phase and surface processes -- Coating by cathode sputtering -- Plasma treatment methods -- Ion beam-supported procedures -- Chemical Vapor Deposition (CVD) -- Physical basics of modern methods of surface and thin film analysis -- Measurements of thin layers during the coating -- Measurements of thin layers after terminated coating process -- Nanoparticle Films -- Optical properties of thin films.
Contained By:	Springer eBooks
Subject:	Thin films - Handbooks, manuals, etc. -
Online resource:	http://dx.doi.org/10.1007/978-3-642-05430-3
ISBN:	9783642054303 (electronic bk.)

Handbook of thin film technology
Handbook of thin film technology[electronic resource] /edited by Hartmut Frey, Hamid R. Khan. - Berlin, Heidelberg :Springer Berlin Heidelberg :2015. - xiii, 379 p. :ill., digital ;24 cm.

Applications and developments of thin film technology -- Importance of the vacuum technology for thin film coatings -- Evaporation in the vacuum -- Basic principle of plasma physics -- Gaseous phase and surface processes -- Coating by cathode sputtering -- Plasma treatment methods -- Ion beam-supported procedures -- Chemical Vapor Deposition (CVD) -- Physical basics of modern methods of surface and thin film analysis -- Measurements of thin layers during the coating -- Measurements of thin layers after terminated coating process -- Nanoparticle Films -- Optical properties of thin films.

"Handbook of Thin Film Technology" covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.

ISBN: 9783642054303 (electronic bk.)

Standard No.: 10.1007/978-3-642-05430-3doiSubjects--Topical Terms:

1613518
Thin films
--Handbooks, manuals, etc.

LC Class. No.: TA418.9.T45

Dewey Class. No.: 621.38152

Handbook of thin film technology
LDR:02192nmm a2200325 a 4500 001 2006248
003 DE-He213
005 20151214091826.0
006 m d
007 cr nn 008maaau
008 160114s2015 gw s 0 eng d
020 $a 9783642054303 (electronic bk.)
020 $a 9783642054297 (paper)
024 7 $a 10.1007/978-3-642-05430-3 $2 doi
035 $a 978-3-642-05430-3
040 $a GP $c GP
041 0 $a eng
050 4 $a TA418.9.T45
072 7 $a TGM $2 bicssc
072 7 $a PNRX $2 bicssc
072 7 $a TEC021000 $2 bisacsh
082 0 4 $a 621.38152 $2 23
090 $a TA418.9.T45 $b H236 2015
245 1 0 $a Handbook of thin film technology $h [electronic resource] / $c edited by Hartmut Frey, Hamid R. Khan.
260 $a Berlin, Heidelberg : $b Springer Berlin Heidelberg : $b Imprint: Springer, $c 2015.
300 $a xiii, 379 p. : $b ill., digital ; $c 24 cm.
505 0 $a Applications and developments of thin film technology -- Importance of the vacuum technology for thin film coatings -- Evaporation in the vacuum -- Basic principle of plasma physics -- Gaseous phase and surface processes -- Coating by cathode sputtering -- Plasma treatment methods -- Ion beam-supported procedures -- Chemical Vapor Deposition (CVD) -- Physical basics of modern methods of surface and thin film analysis -- Measurements of thin layers during the coating -- Measurements of thin layers after terminated coating process -- Nanoparticle Films -- Optical properties of thin films.
520 $a "Handbook of Thin Film Technology" covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.
650 0 $a Thin films $v Handbooks, manuals, etc. $3 1613518
650 1 4 $a Materials Science. $3 890867
650 2 4 $a Surfaces and Interfaces, Thin Films. $3 892408
650 2 4 $a Characterization and Evaluation of Materials. $3 890988
650 2 4 $a Nanotechnology. $3 526235
650 2 4 $a Tribology, Corrosion and Coatings. $3 894259
650 2 4 $a Physical Chemistry. $3 890828
650 2 4 $a Optical and Electronic Materials. $3 891120
700 1 $a Frey, Hartmut. $3 2153096
700 1 $a Khan, Hamid R. $3 2153097
710 2 $a SpringerLink (Online service) $3 836513
773 0 $t Springer eBooks
856 4 0 $u http://dx.doi.org/10.1007/978-3-642-05430-3
950 $a Chemistry and Materials Science (Springer-11644)