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Fundamental principles of engineerin...

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Leach, R. K.

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Fundamental principles of engineering nanometrology

Record Type:	Electronic resources : Monograph/item
Title/Author:	Fundamental principles of engineering nanometrology/ Richard Leach.
Author:	Leach, R. K.
Published:	Oxford, OX :Elsevier, William Andrew, : 2014.,
Description:	xxi, 361 p. :ill. ;25 cm.
Subject:	Metrology. -
Online resource:	http://www.sciencedirect.com/science/book/9781455777532
ISBN:	9781455777532

Fundamental principles of engineering nanometrology
Leach, R. K.

Fundamental principles of engineering nanometrology[electronic resource] /Richard Leach. - 2nd ed. - Oxford, OX :Elsevier, William Andrew,2014. - xxi, 361 p. :ill. ;25 cm. - Micro & nano technologies series. - Micro & nano technologies..

Includes bibliographical references and index.

ISBN: 9781455777532Subjects--Topical Terms:

1086985
Metrology.

LC Class. No.: T174.7 / .L42 2014

Dewey Class. No.: 620.50287

Fundamental principles of engineering nanometrology
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020 $a 9781455777532 (electronic bk.)
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050 0 0 $a T174.7 $b .L42 2014
082 0 4 $a 620.50287 $2 23
100 1 $a Leach, R. K. $3 2152430
245 1 0 $a Fundamental principles of engineering nanometrology $h [electronic resource] / $c Richard Leach.
250 $a 2nd ed.
260 $a Oxford, OX : $b Elsevier, William Andrew, $c 2014.
300 $a xxi, 361 p. : $b ill. ; $c 25 cm.
490 1 $a Micro & nano technologies series
504 $a Includes bibliographical references and index.
650 0 $a Metrology. $3 1086985
650 0 $a Microtechnology. $3 875891
650 0 $a Nanotechnology. $3 526235
830 0 $a Micro & nano technologies. $3 1068665
856 4 0 $u http://www.sciencedirect.com/science/book/9781455777532

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EB T174.7 .L42 2014

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