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Glancing angle deposition of thin fi...

Hawkeye, Matthew M.

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Glancing angle deposition of thin films = engineering the nanoscale /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Glancing angle deposition of thin films/ Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett.
Reminder of title:	engineering the nanoscale /
Author:	Hawkeye, Matthew M.
other author:	Taschuk, Michael T.
Published:	Chichester, West Sussex, United Kingdom :Wiley, : 2014.,
Description:	1 online resource.
Subject:	Nanotechnology. -
Online resource:	http://onlinelibrary.wiley.com/book/10.1002/9781118847510
ISBN:	9781118847336 (ePub)

Glancing angle deposition of thin films = engineering the nanoscale /
Hawkeye, Matthew M.

Glancing angle deposition of thin filmsengineering the nanoscale /[electronic resource] :Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett. - Chichester, West Sussex, United Kingdom :Wiley,2014. - 1 online resource. - Wiley series in materials for electronic and optoelectronic applications. - Wiley series in materials for electronic and optoelectronic applications..

Includes bibliographical references and index.

ISBN: 9781118847336 (ePub)

LCCN: 2014022002Subjects--Topical Terms:

526235
Nanotechnology.

LC Class. No.: T174.7

Dewey Class. No.: 621.3815/2

Glancing angle deposition of thin films = engineering the nanoscale /
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008 151223s2014 enk ob 001 0 eng
010 $a 2014022002
020 $a 9781118847336 (ePub)
020 $a 1118847334 (ePub)
020 $a 9781118847329 (Adobe PDF)
020 $a 1118847326 (Adobe PDF)
020 $z 9781118847565 (cloth)
020 $a 9781118847510 (electronic bk.)
020 $a 1118847512 (electronic bk.)
035 $a (OCoLC)881064962
035 $a ocn881064962
040 $a DLC $b eng $c DLC $d YDX $d N $d DG1 $d YDXCP $d E7B
050 0 0 $a T174.7
082 0 0 $a 621.3815/2 $2 23
100 1 $a Hawkeye, Matthew M. $3 2148604
245 1 0 $a Glancing angle deposition of thin films $h [electronic resource] : $b engineering the nanoscale / $c Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett.
260 $a Chichester, West Sussex, United Kingdom : $b Wiley, $c 2014.
300 $a 1 online resource.
490 1 $a Wiley series in materials for electronic and optoelectronic applications
504 $a Includes bibliographical references and index.
588 $a Description based on print version record and CIP data provided by publisher.
650 0 $a Nanotechnology. $3 526235
650 0 $a Chemical vapor deposition. $3 621056
650 0 $a Nanoelectromechanical systems $x Design and construction. $3 2148607
700 1 $a Taschuk, Michael T. $3 2148605
700 1 $a Brett, Michael J. $3 2148606
830 0 $a Wiley series in materials for electronic and optoelectronic applications. $3 2148048
856 4 0 $u http://onlinelibrary.wiley.com/book/10.1002/9781118847510