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Periodic metallic nanostructures fab...

Li, Wei.

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Periodic metallic nanostructures fabricated by coherent Talbot lithography in a table top system.

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Periodic metallic nanostructures fabricated by coherent Talbot lithography in a table top system./
Author:	Li, Wei.
Description:	71 p.
Notes:	Source: Masters Abstracts International, Volume: 52-02.
Contained By:	Masters Abstracts International52-02(E).
Subject:	Engineering, Electronics and Electrical. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=1544799
ISBN:	9781303361500

Periodic metallic nanostructures fabricated by coherent Talbot lithography in a table top system.
Li, Wei.

Periodic metallic nanostructures fabricated by coherent Talbot lithography in a table top system. - 71 p.

Source: Masters Abstracts International, Volume: 52-02.

Thesis (M.S.)--Colorado State University, 2013.

This thesis describes a novel technique of extreme ultraviolet (EUV) lithography. A compact nanofabrication system that combines Talbot lithography and a table top extreme ultraviolet laser illumination is presented. The lithographic method based on the Talbot effect provides a robust and simple experimental setup that is capable to print arbitrary periodic structures over millimeter square areas free of defects. Test structures were printed and metalized by ion beam etching system which was rebuilt and calibrated as part of this work. The results demonstrate that a complete coherent extreme ultraviolet lithographic process based on a table top system has the capability to fabricate functional periodic metallic nanostructures. Preliminary results and prospects for future work are also presented at the end of this thesis.

ISBN: 9781303361500Subjects--Topical Terms:

626636
Engineering, Electronics and Electrical.

Periodic metallic nanostructures fabricated by coherent Talbot lithography in a table top system.
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005 20140520124313.5
008 150210s2013 ||||||||||||||||| ||eng d
020 $a 9781303361500
035 $a (MiAaPQ)AAI1544799
035 $a AAI1544799
040 $a MiAaPQ $c MiAaPQ
100 1 $a Li, Wei. $3 884990
245 1 0 $a Periodic metallic nanostructures fabricated by coherent Talbot lithography in a table top system.
300 $a 71 p.
500 $a Source: Masters Abstracts International, Volume: 52-02.
500 $a Adviser: Mario C. Marconi.
502 $a Thesis (M.S.)--Colorado State University, 2013.
520 $a This thesis describes a novel technique of extreme ultraviolet (EUV) lithography. A compact nanofabrication system that combines Talbot lithography and a table top extreme ultraviolet laser illumination is presented. The lithographic method based on the Talbot effect provides a robust and simple experimental setup that is capable to print arbitrary periodic structures over millimeter square areas free of defects. Test structures were printed and metalized by ion beam etching system which was rebuilt and calibrated as part of this work. The results demonstrate that a complete coherent extreme ultraviolet lithographic process based on a table top system has the capability to fabricate functional periodic metallic nanostructures. Preliminary results and prospects for future work are also presented at the end of this thesis.
590 $a School code: 0053.
650 4 $a Engineering, Electronics and Electrical. $3 626636
650 4 $a Nanoscience. $3 587832
650 4 $a Nanotechnology. $3 526235
690 $a 0544
690 $a 0565
690 $a 0652
710 2 $a Colorado State University. $b Electrical and Computer Engineering. $3 2094888
773 0 $t Masters Abstracts International $g 52-02(E).
790 $a 0053
791 $a M.S.
792 $a 2013
793 $a English
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=1544799