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Ceramic thick films for MEMS and mic...

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Dorey, Robert A.

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Ceramic thick films for MEMS and microdevices

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Ceramic thick films for MEMS and microdevices/ Robert A. Dorey.
作者:	Dorey, Robert A.
出版者:	Waltham, [MA] :William Andrew, : 2012.,
面頁冊數:	xviii, 191 p. :ill. ;24 cm.
標題:	Thick-film circuits - Design and construction. -
電子資源:	http://www.sciencedirect.com/science/book/9781437778175
ISBN:	9781437778175 (electronic bk.)

Ceramic thick films for MEMS and microdevices
Dorey, Robert A.

Ceramic thick films for MEMS and microdevices[electronic resource] /Robert A. Dorey. - Waltham, [MA] :William Andrew,2012. - xviii, 191 p. :ill. ;24 cm. - Micro and nano technologies series. - Micro & nano technologies..

Includes bibliographical references (p. 183-185) and index.

ISBN: 9781437778175 (electronic bk.)

LCCN: 2011276747Subjects--Topical Terms:

1636653
Thick-film circuits
--Design and construction.

LC Class. No.: TK7871.15.F5 / D67 2012

Dewey Class. No.: 621.3815

Ceramic thick films for MEMS and microdevices
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245 1 0 $a Ceramic thick films for MEMS and microdevices $h [electronic resource] / $c Robert A. Dorey.
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300 $a xviii, 191 p. : $b ill. ; $c 24 cm.
490 0 $a Micro and nano technologies series
504 $a Includes bibliographical references (p. 183-185) and index.
650 # 0 $a Thick-film circuits $x Design and construction. $3 1636653
650 # 0 $a Microelectromechanical systems $x Design and construction. $3 753820
650 # 0 $a Nanoelectronics. $3 898422
830 0 $a Micro & nano technologies. $3 1068665
856 4 0 $u http://www.sciencedirect.com/science/book/9781437778175

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