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Handbook of sputter deposition techn...

Wasa, Kiyotaka.

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Handbook of sputter deposition technology = fundamentals and applications for functional thin films, nano-materials and MEMS /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Handbook of sputter deposition technology/ edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera.
Reminder of title:	fundamentals and applications for functional thin films, nano-materials and MEMS /
other author:	Wasa, Kiyotaka.
Published:	Waltham, MA :William Andrew, : 2012.,
Description:	xii, 644 p. :ill. ;24 cm.
Subject:	Cathode sputtering (Plating process) -
Online resource:	http://www.sciencedirect.com/science/book/9781437734836
ISBN:	9781437734836 (electronic bk.)

Handbook of sputter deposition technology = fundamentals and applications for functional thin films, nano-materials and MEMS /
Handbook of sputter deposition technologyfundamentals and applications for functional thin films, nano-materials and MEMS /[electronic resource] :edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera. - 2nd ed. - Waltham, MA :William Andrew,2012. - xii, 644 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9781437734836 (electronic bk.) Subjects--Topical Terms:

712122
Cathode sputtering (Plating process)

LC Class. No.: TS695 / .W37 2012

Dewey Class. No.: 671.7/38

Handbook of sputter deposition technology = fundamentals and applications for functional thin films, nano-materials and MEMS /
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041 0 $a eng
050 4 $a TS695 $b .W37 2012
082 0 4 $a 671.7/38 $2 23
245 0 0 $a Handbook of sputter deposition technology $h [electronic resource] : $b fundamentals and applications for functional thin films, nano-materials and MEMS / $c edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera.
250 $a 2nd ed.
260 $a Waltham, MA : $b William Andrew, $c 2012.
300 $a xii, 644 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 0 $a Cathode sputtering (Plating process) $3 712122
650 0 $a Thin films $v Handbooks, manuals, etc. $3 1613518
700 1 $a Wasa, Kiyotaka. $3 1638545
700 1 $a Kanno, Isaku. $3 1638546
700 1 $a Kotera, Hidetoshi. $3 1638547
856 4 0 $u http://www.sciencedirect.com/science/book/9781437734836