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Real-time measurements of film growt...

Windover, Donald Arthur.

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Real-time measurements of film growth using fixed-angle X-ray reflectometry and diffraction techniques.

Record Type:	Electronic resources : Monograph/item
Title/Author:	Real-time measurements of film growth using fixed-angle X-ray reflectometry and diffraction techniques./
Author:	Windover, Donald Arthur.
Description:	293 p.
Notes:	Source: Dissertation Abstracts International, Volume: 64-04, Section: B, page: 1786.
Contained By:	Dissertation Abstracts International64-04B.
Subject:	Physics, Radiation. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3088528

Real-time measurements of film growth using fixed-angle X-ray reflectometry and diffraction techniques.
Windover, Donald Arthur.

Real-time measurements of film growth using fixed-angle X-ray reflectometry and diffraction techniques. - 293 p.

Source: Dissertation Abstracts International, Volume: 64-04, Section: B, page: 1786.

Thesis (Ph.D.)--Rensselaer Polytechnic Institute, 2003.

This thesis details the use of X-ray characterization techniques to measure thickness, crystallinity, phase, and texture of thin films in-situ . This work is organized into 4 distinct chapters; a detailed discussion of X-ray generation and detection for comparing "speed" and "intensity" of various characterization techniques for real time applications, a brief look at deposition system designed and constructed around an X-ray instrument, an example of X-ray phase and texture measurement using a 2-dimensional area detector and a brief discussion on advantages/disadvantages for in-situ analysis, and a detailed approach to energy dispersive X-ray reflectometry measurement of film thickness and a step-by-step listing of measurable quantities and limitations to energy-dispersive modeling.Subjects--Topical Terms:

1019212
Physics, Radiation.

Real-time measurements of film growth using fixed-angle X-ray reflectometry and diffraction techniques.
LDR:02322nmm 2200289 4500 001 1861894
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008 130614s2003 eng d
035 $a (UnM)AAI3088528
035 $a AAI3088528
040 $a UnM $c UnM
100 1 $a Windover, Donald Arthur. $3 1949474
245 1 0 $a Real-time measurements of film growth using fixed-angle X-ray reflectometry and diffraction techniques.
300 $a 293 p.
500 $a Source: Dissertation Abstracts International, Volume: 64-04, Section: B, page: 1786.
500 $a Adviser: Toh-Ming Lu.
502 $a Thesis (Ph.D.)--Rensselaer Polytechnic Institute, 2003.
520 $a This thesis details the use of X-ray characterization techniques to measure thickness, crystallinity, phase, and texture of thin films in-situ . This work is organized into 4 distinct chapters; a detailed discussion of X-ray generation and detection for comparing "speed" and "intensity" of various characterization techniques for real time applications, a brief look at deposition system designed and constructed around an X-ray instrument, an example of X-ray phase and texture measurement using a 2-dimensional area detector and a brief discussion on advantages/disadvantages for in-situ analysis, and a detailed approach to energy dispersive X-ray reflectometry measurement of film thickness and a step-by-step listing of measurable quantities and limitations to energy-dispersive modeling.
520 $a The principal advancements to the X-ray field presented include the incorporation of energy-dependent anomalous atomic scattering factors into the reflectometry modeling to better characterize energy dispersive reflectometry data. The thesis details the energy dispersive reflectometry limitations caused by instrument response functions and geometric source and detector divergences using a graphical, reciprocal space approach applicable for refining the development of new in-situ characterization tools for industry. The thesis concludes with an appendix of modeling routines used for data fitting.
590 $a School code: 0185.
650 4 $a Physics, Radiation. $3 1019212
650 4 $a Physics, Condensed Matter. $3 1018743
650 4 $a Engineering, Materials Science. $3 1017759
690 $a 0756
690 $a 0611
690 $a 0794
710 2 0 $a Rensselaer Polytechnic Institute. $3 1019062
773 0 $t Dissertation Abstracts International $g 64-04B.
790 1 0 $a Lu, Toh-Ming, $e advisor
790 $a 0185
791 $a Ph.D.
792 $a 2003
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3088528