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A low-cost short-distance thermal co...

Ma, Yan.

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A low-cost short-distance thermal conduction pressure sensor.

Record Type:	Electronic resources : Monograph/item
Title/Author:	A low-cost short-distance thermal conduction pressure sensor./
Author:	Ma, Yan.
Description:	108 p.
Notes:	Source: Masters Abstracts International, Volume: 44-01, page: 0530.
Contained By:	Masters Abstracts International44-01.
Subject:	Engineering, Mechanical. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=MR03510
ISBN:	9780494035108

A low-cost short-distance thermal conduction pressure sensor.
Ma, Yan.

A low-cost short-distance thermal conduction pressure sensor. - 108 p.

Source: Masters Abstracts International, Volume: 44-01, page: 0530.

Thesis (M.A.Sc.)--Simon Fraser University (Canada), 2005.

A low-cost thermal pressure sensor based on short-distance thermal conduction and used in atmospheric pressure range has been explored. This simple device consists of a heater made of a polysilicon resistor, a heat sink made by the silicon substrate and a tiny air gap between them. With innovative ideas and simple processes, the gap can be made in the order of nanometers inexpensively, which significantly increases the measurement range of the sensor. Devices capable of measuring 700kPa (7atm) or more have been fabricated with a 3-mask, 3mum and CMOS compatible process. The device can be made as small as 50 x 50mum2, less than the size of a standard bonding pad. The simple process and low cost associated with these devices could make commercial adaptation promising.

ISBN: 9780494035108Subjects--Topical Terms:

783786
Engineering, Mechanical.

A low-cost short-distance thermal conduction pressure sensor.
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008 130610s2005 eng d
020 $a 9780494035108
035 $a (UnM)AAIMR03510
035 $a AAIMR03510
040 $a UnM $c UnM
100 1 $a Ma, Yan. $3 1267210
245 1 2 $a A low-cost short-distance thermal conduction pressure sensor.
300 $a 108 p.
500 $a Source: Masters Abstracts International, Volume: 44-01, page: 0530.
502 $a Thesis (M.A.Sc.)--Simon Fraser University (Canada), 2005.
520 $a A low-cost thermal pressure sensor based on short-distance thermal conduction and used in atmospheric pressure range has been explored. This simple device consists of a heater made of a polysilicon resistor, a heat sink made by the silicon substrate and a tiny air gap between them. With innovative ideas and simple processes, the gap can be made in the order of nanometers inexpensively, which significantly increases the measurement range of the sensor. Devices capable of measuring 700kPa (7atm) or more have been fabricated with a 3-mask, 3mum and CMOS compatible process. The device can be made as small as 50 x 50mum2, less than the size of a standard bonding pad. The simple process and low cost associated with these devices could make commercial adaptation promising.
590 $a School code: 0791.
650 4 $a Engineering, Mechanical. $3 783786
690 $a 0548
710 2 0 $a Simon Fraser University (Canada). $3 1020621
773 0 $t Masters Abstracts International $g 44-01.
790 $a 0791
791 $a M.A.Sc.
792 $a 2005
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=MR03510