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Decal transfer lithography.

Childs, William Robert.

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Decal transfer lithography.

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Decal transfer lithography./
作者:	Childs, William Robert.
面頁冊數:	194 p.
附註:	Source: Dissertation Abstracts International, Volume: 66-01, Section: B, page: 0302.
Contained By:	Dissertation Abstracts International66-01B.
標題:	Chemistry, Polymer. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3160873
ISBN:	9780496944477

Decal transfer lithography.
Childs, William Robert.

Decal transfer lithography. - 194 p.

Source: Dissertation Abstracts International, Volume: 66-01, Section: B, page: 0302.

Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2004.

A new soft-lithographic method for micropatterning polymeric resists, Decal Transfer Lithography (DTL), is described. This technique is based on the adhesive transfer of elastomeric decal patterns via the engineered adhesion and release properties of a compliant poly(dimethylsiloxane) (PDMS) patterning tool. This procedure is capable of transferring micron to sub-micron-sized features with high fidelity over large substrate areas in both open and closed forms, negative and positive image contrasts. Methods are introduced to promote adhesion of PDMS to noble metals using either of two methods: self-assembling monolayers (SAMs) or silicon dioxide capping layers. A novel UV/Ozone (UVO) mask was developed, which allows the photopatterning of UVO modifications of polymer surfaces. This modification in turn enables the direct photoinitiated patterning of resist patterns transferred by the soft-lithographic DTL method Photodefined-Cohesive Mechanical Failure (P-CMF), which fuses the design rules of the contact based adhesive transfer of PDMS in DTL with those of photolithography. The second, so-called Spartacus method, transfers the design rules of photolithography directly onto PDMS surfaces, enabling a photodefined adhesive transfer of PDMS films onto silicon oxide surfaces. The most significant advance embodied in the DTL method, however, is that is offers useful new capabilities for the design and fabrication of patterns of non-planar surfaces, 3D microfluidic assemblies, and microreactors.

ISBN: 9780496944477Subjects--Topical Terms:

1018428
Chemistry, Polymer.

Decal transfer lithography.
LDR:02369nmm 2200277 4500 001 1819708
005 20061101121636.5
008 130610s2004 eng d
020 $a 9780496944477
035 $a (UnM)AAI3160873
035 $a AAI3160873
040 $a UnM $c UnM
100 1 $a Childs, William Robert. $3 1908979
245 1 0 $a Decal transfer lithography.
300 $a 194 p.
500 $a Source: Dissertation Abstracts International, Volume: 66-01, Section: B, page: 0302.
500 $a Adviser: Ralph G. Nuzzo.
502 $a Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2004.
520 $a A new soft-lithographic method for micropatterning polymeric resists, Decal Transfer Lithography (DTL), is described. This technique is based on the adhesive transfer of elastomeric decal patterns via the engineered adhesion and release properties of a compliant poly(dimethylsiloxane) (PDMS) patterning tool. This procedure is capable of transferring micron to sub-micron-sized features with high fidelity over large substrate areas in both open and closed forms, negative and positive image contrasts. Methods are introduced to promote adhesion of PDMS to noble metals using either of two methods: self-assembling monolayers (SAMs) or silicon dioxide capping layers. A novel UV/Ozone (UVO) mask was developed, which allows the photopatterning of UVO modifications of polymer surfaces. This modification in turn enables the direct photoinitiated patterning of resist patterns transferred by the soft-lithographic DTL method Photodefined-Cohesive Mechanical Failure (P-CMF), which fuses the design rules of the contact based adhesive transfer of PDMS in DTL with those of photolithography. The second, so-called Spartacus method, transfers the design rules of photolithography directly onto PDMS surfaces, enabling a photodefined adhesive transfer of PDMS films onto silicon oxide surfaces. The most significant advance embodied in the DTL method, however, is that is offers useful new capabilities for the design and fabrication of patterns of non-planar surfaces, 3D microfluidic assemblies, and microreactors.
590 $a School code: 0090.
650 4 $a Chemistry, Polymer. $3 1018428
650 4 $a Engineering, Materials Science. $3 1017759
690 $a 0495
690 $a 0794
710 2 0 $a University of Illinois at Urbana-Champaign. $3 626646
773 0 $t Dissertation Abstracts International $g 66-01B.
790 1 0 $a Nuzzo, Ralph G., $e advisor
790 $a 0090
791 $a Ph.D.
792 $a 2004
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3160873