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Characteristics and applications of ...

George, Anoop.

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Characteristics and applications of a scanning nano-slit optical sensor.

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Characteristics and applications of a scanning nano-slit optical sensor./
Author:	George, Anoop.
Description:	159 p.
Notes:	Source: Dissertation Abstracts International, Volume: 72-04, Section: B, page: .
Contained By:	Dissertation Abstracts International72-04B.
Subject:	Engineering, General. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3443655
ISBN:	9781124489520

Characteristics and applications of a scanning nano-slit optical sensor.
George, Anoop.

Characteristics and applications of a scanning nano-slit optical sensor. - 159 p.

Source: Dissertation Abstracts International, Volume: 72-04, Section: B, page: .

Thesis (Ph.D.)--The University of Arizona, 2011.

In this dissertation, imaging characteristics of a nano-slit are investigated. Applications of a scanning and rotating nano-slit in measuring sub-micron aerial features are demonstrated. Coherent sub-micron spot distributions are reconstructed with a very high contrast. Finally, high NA partially coherent images with features as small as 210 nm half-pitch are reconstructed and the ultimate resolution of the system is determined.

ISBN: 9781124489520Subjects--Topical Terms:

1020744
Engineering, General.

Characteristics and applications of a scanning nano-slit optical sensor.
LDR:02797nam 2200325 4500 001 1396030
005 20110527105452.5
008 130515s2011 ||||||||||||||||| ||eng d
020 $a 9781124489520
035 $a (UMI)AAI3443655
035 $a AAI3443655
040 $a UMI $c UMI
100 1 $a George, Anoop. $3 1674782
245 1 0 $a Characteristics and applications of a scanning nano-slit optical sensor.
300 $a 159 p.
500 $a Source: Dissertation Abstracts International, Volume: 72-04, Section: B, page: .
500 $a Adviser: Thomas D. Milster.
502 $a Thesis (Ph.D.)--The University of Arizona, 2011.
520 $a In this dissertation, imaging characteristics of a nano-slit are investigated. Applications of a scanning and rotating nano-slit in measuring sub-micron aerial features are demonstrated. Coherent sub-micron spot distributions are reconstructed with a very high contrast. Finally, high NA partially coherent images with features as small as 210 nm half-pitch are reconstructed and the ultimate resolution of the system is determined.
520 $a A nano-slit is characterized as a sensor for coherent line-and-space features. Experiments and simulation verify image detection with contrasts greater than 0.9. Effects of polarization on imaging performance are reported. A scanning and rotating nano-slit in conjunction with a filtered back-projection technique is used to reconstruct sub-micron coherent spot distributions. Simulation results show very good agreement with the experiment. Further, it is shown that the reconstruction is very resilient to some common random experimental errors.
520 $a Imaging characteristics of a scanning nano-slit sensor are determined for high NA partially coherent images. Good imaging performance (contrast > 0.8) is demonstrated with line-and-space images up to a spatial frequency of 2.38 lp / mum. Sub-micron features in a high NA partially coherent image are measured with a scanning and rotating nano-slit. A modified microscope is used to create the measured features, including 210 nm half-pitch features that cannot be imaged using the microscope in a conventional imaging mode. Using the filtered back projection technique, two-dimensional sub-micron features are reconstructed by the nano-slit sensor. It is determined that the resolution limit of &sim;200 nm is determined by the reconstruction technique and not by the width of the nano-slit.
590 $a School code: 0009.
650 4 $a Engineering, General. $3 1020744
650 4 $a Physics, Optics. $3 1018756
690 $a 0537
690 $a 0752
710 2 $a The University of Arizona. $b Optical Sciences. $3 1019548
773 0 $t Dissertation Abstracts International $g 72-04B.
790 1 0 $a Milster, Thomas D., $e advisor
790 1 0 $a Burge, James H. $e committee member
790 1 0 $a Kupinski, Matthew A. $e committee member
790 $a 0009
791 $a Ph.D.
792 $a 2011
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3443655