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Principles of physical vapor deposit...

SreeHarsha, K. S.

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Principles of physical vapor deposition of thin films

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Principles of physical vapor deposition of thin films/ K.S. Sree Harsha.
作者:	SreeHarsha, K. S.
出版者:	Amsterdam ;Elsevier, : 2006.,
面頁冊數:	1 online resource (xi, 1160 p.) :ill.
標題:	Thin films. -
電子資源:	http://www.sciencedirect.com/science/book/9780080446998
ISBN:	9780080446998

Principles of physical vapor deposition of thin films
SreeHarsha, K. S.

Principles of physical vapor deposition of thin films[electronic resource] /K.S. Sree Harsha. - 1st ed. - Amsterdam ;Elsevier,2006. - 1 online resource (xi, 1160 p.) :ill.

Includes bibliographical references and index.

The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible. * Offers detailed derivation of important formulae. * Thoroughly covers the basic principles of materials science that are important to any thin film preparation. * Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text.

ISBN: 9780080446998

Source: 112953:113041Elsevier Science & Technologyhttp://www.sciencedirect.comSubjects--Topical Terms:

626403
Thin films.
Index Terms--Genre/Form:

542853
Electronic books.

LC Class. No.: QC176.83 / .S68 2006eb

Dewey Class. No.: 621.38152

Principles of physical vapor deposition of thin films
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