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Advanced materials and technologies ...

Dideikin, Arthur.

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Advanced materials and technologies for micro/nano-devices, sensors and actuators

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Advanced materials and technologies for micro/nano-devices, sensors and actuators/ edited by Evgeni Gusev, Eric Garfunkel, Arthur Dideikin.
other author:	Dideikin, Arthur.
Published:	Dordrecht :Springer Science+Business Media B.V., : 2010.,
Description:	322 p. :ill. (some col.), digital ;24 cm.
Series:	NATO Science for Peace and Security Series B : Physics and Biophysics,
Contained By:	Springer eBooks
Subject:	Microelectromechanical systems - Design and construction. -
Online resource:	http://dx.doi.org/10.1007/978-90-481-3807-4
ISBN:	9789048138050 (paper)

Advanced materials and technologies for micro/nano-devices, sensors and actuators
Advanced materials and technologies for micro/nano-devices, sensors and actuators[electronic resource] /edited by Evgeni Gusev, Eric Garfunkel, Arthur Dideikin. - Dordrecht :Springer Science+Business Media B.V.,2010. - 322 p. :ill. (some col.), digital ;24 cm. - NATO Science for Peace and Security Series B : Physics and Biophysics,1874-6500.

ISBN: 9789048138050 (paper)Subjects--Topical Terms:

753820
Microelectromechanical systems
--Design and construction.

Dewey Class. No.: 621.381

Advanced materials and technologies for micro/nano-devices, sensors and actuators
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020 $a 9789048138050 (paper)
020 $a 9789048138074 (electronic bk.)
035 $a 978-90-481-3805-0
082 0 4 $a 621.381 $2 22
245 0 0 $a Advanced materials and technologies for micro/nano-devices, sensors and actuators $h [electronic resource] / $c edited by Evgeni Gusev, Eric Garfunkel, Arthur Dideikin.
260 $a Dordrecht : $c 2010. $b Springer Science+Business Media B.V.,
300 $a 322 p. : $b ill. (some col.), digital ; $c 24 cm.
440 0 $a NATO Science for Peace and Security Series B : Physics and Biophysics, $x 1874-6500
650 0 $a Microelectromechanical systems $x Design and construction. $3 753820
650 1 4 $a Chemistry. $3 516420
650 2 4 $a Mechanical Engineering. $3 891038
650 2 4 $a Mechanics. $3 525881
650 2 4 $a Microengineering. $3 1085059
650 2 4 $a Microwaves, RF and Optical Engineering. $3 893985
650 2 4 $a Nanotechnology and Microengineering. $3 1005737
700 1 $a Dideikin, Arthur. $3 1087018
700 1 $a Garfunkel, Eric. $3 1087019
700 1 $a Gusev, Evgeni. $3 1087020
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856 4 0 $u http://dx.doi.org/10.1007/978-90-481-3807-4
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