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Principles and Applications of NanoMEMS Physics

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Principles and Applications of NanoMEMS Physics/ by Hector J. Santos.
Author:	Santos, Hector J..
Published:	Boston, MA :Springer, : 2005.,
Description:	xv, 254 p. :ill., digital ;25 cm.
Series:	Microsystems,
Contained By:	Springer e-books
Subject:	Microelectromechanical systems. -
Online resource:	http://dx.doi.org/10.1007/b136228http://dx.doi.org/10.1007/b136228
ISBN:	9780387258348 (electronic bk.)

Principles and Applications of NanoMEMS Physics
Santos, Hector J..

Principles and Applications of NanoMEMS Physics[electronic resource] /by Hector J. Santos. - Boston, MA :Springer,2005. - xv, 254 p. :ill., digital ;25 cm. - Microsystems,151389-2134 ;.

ISBN: 9780387258348 (electronic bk.)Subjects--Topical Terms:

567138
Microelectromechanical systems.

LC Class. No.: QC688 / .S28 2005

Dewey Class. No.: 537.5

Principles and Applications of NanoMEMS Physics
LDR:00824nam a2200241 a 45 001 764993
003 Springer
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006 m d
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008 080716s2005 mau j eng d
020 $a 9780387258348 (electronic bk.)
020 $a 9781402032387 (paper)
035 $a 978-1-4020-3238-7
040 $a NDHU $c NDHU $d NDHU
050 0 0 $a QC688 $b .S28 2005
082 0 0 $a 537.5 $2 22
100 $a Santos, Hector J.. $3 894188
245 1 0 $a Principles and Applications of NanoMEMS Physics $h [electronic resource] / $c by Hector J. Santos.
260 $a Boston, MA : $c 2005. $b Springer,
300 $a xv, 254 p. : $b ill., digital ; $c 25 cm.
440 0 $a Microsystems, $x 1389-2134 ; $v 15
650 $a Microelectromechanical systems. $3 567138
650 $a Nanotechnology. $3 526235
650 $a Quantum electronics. $3 535898
650 $a Wave-particle duality. $3 550917
650 $a Chemistry. $3 516420
650 $a Electronic and Computer Engineering. $3 891119
650 $a Laser Technology and Physics, Photonics. $3 893984
650 $a Optical and Electronic Materials. $3 891120
650 $a Quantum Optics, Quantum Electronics, Nonlinear Optics. $3 894038
710 $a SpringerLink (Online service) $3 836513
773 0 $t Springer e-books
856 4 0 $u http://dx.doi.org/10.1007/b136228 $z http://dx.doi.org/10.1007/b136228
950 $a Chemistry and Materials Science (Springer-11644; ZDB-2-CMS)

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