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Microtechnology and Mems,
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thermal transport for applications i...
thermal transport for applications in micro/nanomachining
integrated chemical microsensor syst...
integrated chemical microsensor systems in cmos technology
force sensors for microelectronic pa...
force sensors for microelectronic packaging applications
ccd image sensors in deep-ultraviolet
ccd image sensors in deep-ultraviolet
electromechanical systems in microte...
electromechanical systems in microtechnology and mechatronics
design and manufacturing of active m...
design and manufacturing of active microsystems
engineering of micro/nano biosystems
engineering of micro/nano biosystems
piezo-electric electro-acoustic tran...
piezo-electric electro-acoustic transducers
piezotronics and piezo-phototronics
piezotronics and piezo-phototronics
piezotronics and piezo-phototronics
piezotronics and piezo-phototronics
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