東華大學圖書館 |

Language: English

Help

回圖書館首頁

手機版館藏查詢

Back

Switch To: Labeled | MARC Mode | ISBD

Linked to FindBook

Google Book

Amazon

博客來

Plasma processing and processing science

Record Type:	Electronic resources : Monograph/item
Title/Author:	Plasma processing and processing science/ Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
other author:	Chen, Francis F.,
Published:	Washington, D.C. :National Academy Press, : 1995.,
Description:	x, 35 p. ;28 cm.
Notes:	Committee chair: Francis F. Chen.
Series:	NRL strategic series
Subject:	Plasma engineering. -
Online resource:	https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=123670An electronic book accessible through the World Wide Web; click for information
ISBN:	0309575168 (electronic bk.)

Plasma processing and processing science
Plasma processing and processing science[electronic resource] /Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. - Washington, D.C. :National Academy Press,1995. - x, 35 p. ;28 cm. - NRL strategic series.

Committee chair: Francis F. Chen.

Electronic reproduction.
Boulder, Colo. :
NetLibrary,
2005.

Available via World Wide Web.

ISBN: 0309575168 (electronic bk.)Subjects--Topical Terms:

674159
Plasma engineering.
Index Terms--Genre/Form:

542853
Electronic books.

LC Class. No.: TA2020 / .P5 1995eb

Dewey Class. No.: 621.044

Plasma processing and processing science
LDR:01325nmm a2200277 a 45 001 737468
003 OCoLC
005 20080418
006 m d
007 cr cnu---unuuu
008 250519s1995 dcu s 000 0 eng d
020 $a 0309575168 (electronic bk.)
035 $a ocm58567010
035 $a 737468
040 $a N $c N
049 $a AMFA
050 1 4 $a TA2020 $b .P5 1995eb
082 0 4 $a 621.044 $2 22
245 0 0 $a Plasma processing and processing science $h [electronic resource] / $c Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
260 $a Washington, D.C. : $c 1995. $b National Academy Press,
300 $a x, 35 p. ; $c 28 cm.
440 0 $a NRL strategic series
500 $a Committee chair: Francis F. Chen.
500 $a This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124.
533 $a Electronic reproduction. $b Boulder, Colo. : $c NetLibrary, $d 2005. $n Available via World Wide Web. $n Access may be limited to NetLibrary affiliated libraries.
650 $a Plasma engineering. $3 674159
650 $a Plasma etching. $3 712111
650 $a Semiconductors $x Etching. $3 837117
655 $a Electronic books. $2 lcsh $3 542853
700 $a Chen, Francis F., $d 1929- $3 726198
710 $a National Research Council (U.S.). $b Commission on Physical Sciences, Mathematics, and Applications. $3 761910
710 $a National Research Council (U.S.). $b Naval Studies Board. $3 777415
710 $a National Research Council (U.S.). $b Panel on Plasma Processing. $3 837116
710 $a NetLibrary, Inc. $3 542851
856 4 0 $3 Bibliographic record display $u https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=123670 $z An electronic book accessible through the World Wide Web; click for information
994 $a 92 $b AMF