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Introduction to microsystem design

Schomburg, Werner Karl.

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Introduction to microsystem design

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Introduction to microsystem design/ by Werner Karl Schomburg.
Author:	Schomburg, Werner Karl.
Published:	Berlin, Heidelberg :Springer Berlin Heidelberg : : 2015.,
Description:	xxiv, 374 p. :ill., digital ;24 cm.
[NT 15003449]:	Scaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Electrical Measurements -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies of physical domains -- Mechanical devices for electronics.
Contained By:	Springer eBooks
Subject:	Microelectromechanical systems - Design and construction. -
Online resource:	http://dx.doi.org/10.1007/978-3-662-47023-7
ISBN:	9783662470237 (electronic bk.)

Introduction to microsystem design
Schomburg, Werner Karl.

Introduction to microsystem design[electronic resource] /by Werner Karl Schomburg. - 2nd ed. - Berlin, Heidelberg :Springer Berlin Heidelberg :2015. - xxiv, 374 p. :ill., digital ;24 cm. - RWTHedition,1865-0899. - RWTHedition..

Scaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Electrical Measurements -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies of physical domains -- Mechanical devices for electronics.

This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.

ISBN: 9783662470237 (electronic bk.)

Standard No.: 10.1007/978-3-662-47023-7doiSubjects--Topical Terms:

753820
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK7875

Dewey Class. No.: 621.381

Introduction to microsystem design
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100 1 $a Schomburg, Werner Karl. $3 2156624
245 1 0 $a Introduction to microsystem design $h [electronic resource] / $c by Werner Karl Schomburg.
250 $a 2nd ed.
260 $a Berlin, Heidelberg : $b Springer Berlin Heidelberg : $b Imprint: Springer, $c 2015.
300 $a xxiv, 374 p. : $b ill., digital ; $c 24 cm.
490 1 $a RWTHedition, $x 1865-0899
505 0 $a Scaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Electrical Measurements -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies of physical domains -- Mechanical devices for electronics.
520 $a This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.
650 0 $a Microelectromechanical systems $x Design and construction. $3 753820
650 1 4 $a Engineering. $3 586835
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 893838
650 2 4 $a Circuits and Systems. $3 896527
650 2 4 $a Nanotechnology and Microengineering. $3 1005737
710 2 $a SpringerLink (Online service) $3 836513
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830 0 $a RWTHedition. $3 2156625
856 4 0 $u http://dx.doi.org/10.1007/978-3-662-47023-7
950 $a Engineering (Springer-11647)