Epitaxy.
Overview
| Works: | 9 works in 4 publications in 4 languages | |
|---|---|---|
Titles
Current issues in heteroepitaxial growth--stress relaxation and self assembly /
by:
(Language materials, printed)
Investigation on SiGe selective epitaxy for source and drain engineering in 22 nm CMOS technology node and beyond
by:
(Electronic resources)
Epitaxy of semiconductors = physics and fabrication of heterostructures /
by:
(Electronic resources)
Atomic layer deposition = principles, characteristics, and nanotechnology applications /
by:
(Electronic resources)
Subjects