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主題
Microelectromechanical systems - Materials.
概要
作品:
3 作品在 1 項出版品 1 種語言
書目資訊
Handbook of silicon based MEMS = materials & technologies /
by:
(書目-電子資源)
MEMS materials and processes handbook
by:
(書目-電子資源)
Handbook of silicon based MEMS materials and technologies
by:
(書目-電子資源)
主題
Microelectromechanical systems.
Electronics and Microelectronics, Instrumentation.
Surfaces and Interfaces, Thin Films.
Materials Science, general.
Circuits and Systems.
Silicon- Electric properties.
Microelectromechanical systems- Materials.
Engineering.
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