Microtechnology and MEMS,

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integrated chemical microsensor syst...

integrated chemical microsensor systems in cmos technology

thermal transport for applications i...

thermal transport for applications in micro/nanomachining

electromechanical systems in microte...

electromechanical systems in microtechnology and mechatronics

design and manufacturing of active m...

design and manufacturing of active microsystems

force sensors for microelectronic pa...

force sensors for microelectronic packaging applications

ccd image sensors in deep-ultraviolet

engineering of micro/nano biosystems

piezo-electric electro-acoustic tran...

piezo-electric electro-acoustic transducers

piezotronics and piezo-phototronics