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陳維容
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Titles
磁控濺鍍法製備氧化鋁氧化釔薄膜及其性質之研究 = = Al2O3 – Y2O3 Thin Films Prepared by Magnetron Sputtering /
by: 陳維容
(Language materials, printed)
Subjects
磁控濺鍍法
氧化鋁
氧化釔
介電常數
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