Symposium on silicon materials science and technology (1986))

Proceedings of the fifth International Symposium on silicon materials science and technology : = semiconductor silicon 1986 / by: Abe, Takao.; Huff, Howard R.; Electrochemical Society., Dielectrics and Insulation Division.; Electrochemical Society., Electronics Division.; Symposium on silicon materials science and technology (1986)) (Language materials, printed)