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Thin-film and depth-profile analysis /

~

Etzkorn, H. W.

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Thin-film and depth-profile analysis /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Thin-film and depth-profile analysis // edited by H. Oechsner ; with contributions by H.W. Etzkorn ... [et al.].
other author:	Etzkorn, H. W.
Published:	Berlin ;Springer-Verlag, : 1984.,
Description:	xi, 205 p. :ill. ;25 cm.
Notes:	Catalogong based on CIP information.
Series:	Topics in current physics ;
標題:	Sputtering (Physics) -
ISBN:	0387133208 (U.S.)

Thin-film and depth-profile analysis /
Thin-film and depth-profile analysis /edited by H. Oechsner ; with contributions by H.W. Etzkorn ... [et al.]. - Berlin ;Springer-Verlag,1984. - xi, 205 p. :ill. ;25 cm. - Topics in current physics ;37.

Catalogong based on CIP information.

Includes bibliographical references and index.

ISBN: 0387133208 (U.S.)

LCCN: 84005394Subjects--Topical Terms:

697333
Sputtering (Physics)

LC Class. No.: QC176.84.S93 / T46 1984

Dewey Class. No.: 530.4/1

Thin-film and depth-profile analysis /
LDR:00678pam a2200193 a 45 001 667386
005 19900628110023.3
008 840319s1984 wb a b 00100 eng
010 $a 84005394
020 $a 0387133208 (U.S.)
035 $a jg 00000510
040 $a DLC $c DLC $d DLC
050 1 0 $a QC176.84.S93 $b T46 1984
082 0 0 $a 530.4/1 $2 19
245 0 0 $a Thin-film and depth-profile analysis / $c edited by H. Oechsner ; with contributions by H.W. Etzkorn ... [et al.].
260 0 $a Berlin ; $a New York : $c 1984. $b Springer-Verlag,
300 $a xi, 205 p. : $b ill. ; $c 25 cm.
440 0 $a Topics in current physics ; $v 37
500 $a Catalogong based on CIP information.
504 $a Includes bibliographical references and index.
650 $a Sputtering (Physics) $3 697333
650 $a Surface chemistry. $3 551428
650 $a Thin films $x Surfaces. $3 697334
700 $a Etzkorn, H. W. $3 697331
700 $a Oechsner, H. $q (Hans), $d 1934- $3 697332

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罕用書庫221室(美崙校區,調書請點預約)(RU_221)

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QC176.84.S93 T443 1984

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