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Science and technology of semiconduc...

Higashi, Gregg S.

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Science and technology of semiconductor surface preparation : = symposium held April 1-3, 1997, San Francisco, California, U.S.A. /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Science and technology of semiconductor surface preparation :/ editors, Gregg S. Higashi ... [et al.].
Reminder of title:	symposium held April 1-3, 1997, San Francisco, California, U.S.A. /
other author:	Higashi, Gregg S.
Published:	Pittsburgh, Pa. :Materials Research Society, : c1997.,
Description:	xiii, 545 p. :ill. ;24 cm.
Subject:	Semiconductors - Cleaning -
ISBN:	1558993819 :

Science and technology of semiconductor surface preparation : = symposium held April 1-3, 1997, San Francisco, California, U.S.A. /
Science and technology of semiconductor surface preparation :symposium held April 1-3, 1997, San Francisco, California, U.S.A. /editors, Gregg S. Higashi ... [et al.]. - Pittsburgh, Pa. :Materials Research Society,c1997. - xiii, 545 p. :ill. ;24 cm. - Materials Research Society symposium proceedings,v. 4770272-9172 ;. - Materials Research Society symposia proceedings ;v. 477..

Includes bibliographical references and indexes.

ISBN: 1558993819 :US79.00

LCCN: 97028526Subjects--Topical Terms:

714656
Semiconductors
--Cleaning

LC Class. No.: TK7871.85 / .S396 1997

Dewey Class. No.: 621.3815/2

Science and technology of semiconductor surface preparation : = symposium held April 1-3, 1997, San Francisco, California, U.S.A. /
LDR:00734cam a2200181 a 45 001 676863
005 20000501132549.1
008 000428s1997 paua b 101 0 eng
010 $a 97028526
020 $a 1558993819 : $c US79.00
035 $a psw89000033
040 $a DLC $c DLC $d DLC $d DH
050 0 0 $a TK7871.85 $b .S396 1997
082 0 0 $a 621.3815/2 $2 21
245 0 0 $a Science and technology of semiconductor surface preparation : $b symposium held April 1-3, 1997, San Francisco, California, U.S.A. / $c editors, Gregg S. Higashi ... [et al.].
260 $a Pittsburgh, Pa. : $c c1997. $b Materials Research Society,
300 $a xiii, 545 p. : $b ill. ; $c 24 cm.
490 1 $a Materials Research Society symposium proceedings, $x 0272-9172 ; $v v. 477
504 $a Includes bibliographical references and indexes.
650 $a Semiconductors $x Cleaning $x Congresses. $3 714656
650 $a Semiconductors $x Surfaces $x Congresses. $3 703343
650 $a Surface chemistry $x Congresses. $3 659030
650 $a Surface preparation $x Congresses. $3 714657
700 $a Higashi, Gregg S. $3 714652
700 $a Hirose, Masataka $3 714653
700 $a Raghavan, Srini $3 714654
700 $a Verhaverbeke, Steven $3 714655
830 $a Materials Research Society symposia proceedings ; $v v. 477. $3 714658