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Plasma etching : = an introduction /
~
Flamm, Daniel L.
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Plasma etching : = an introduction /
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Plasma etching :/ edited by Dennis M. Manos, Daniel L. Flamm.
Reminder of title:
an introduction /
other author:
Flamm, Daniel L.
Published:
San Diego ;Academic Press, : c1989.,
Description:
xii, 476 p. :ill. ;24 cm.
Series:
Plasma -- materials interactions.
Subject:
Plasma etching. -
ISBN:
0124693709 :
Plasma etching : = an introduction /
Plasma etching :
an introduction /edited by Dennis M. Manos, Daniel L. Flamm. - San Diego ;Academic Press,c1989. - xii, 476 p. :ill. ;24 cm. - Plasma -- materials interactions..
Includes bibliographical references and index.
ISBN: 0124693709 :US116.00
LCCN: 87037419Subjects--Topical Terms:
712111
Plasma etching.
LC Class. No.: TA2020 / .P5 1989
Dewey Class. No.: 621.044
Plasma etching : = an introduction /
LDR
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c1989.
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Academic Press,
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xii, 476 p. :
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24 cm.
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Plasma -- materials interactions.
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Includes bibliographical references and index.
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Flamm, Daniel L.
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Manos, Dennis M.
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712110
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六樓西文書區HC-Z(6F Western Language Books)
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1
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W0042692
六樓西文書區HC-Z(6F Western Language Books)
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TA2020 P5 1989
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